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Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition

Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Jan Musschoot (UGent) and Christophe Detavernier (UGent)
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MLA
Dendooven, Jolien, Davy Deduytsche, Jan Musschoot, et al. “Conformality of Al2O3 Deposited by Thermal, Plasma-enhanced and Ozone-based Atomic Layer Deposition.” Atomic Layer Deposition, 10th International Conference, Abstracts. 2010. Print.
APA
Dendooven, J., Deduytsche, D., Musschoot, J., & Detavernier, C. (2010). Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition. Atomic Layer Deposition, 10th International conference, Abstracts. Presented at the 10th International conference on Atomic Layer Deposition.
Chicago author-date
Dendooven, Jolien, Davy Deduytsche, Jan Musschoot, and Christophe Detavernier. 2010. “Conformality of Al2O3 Deposited by Thermal, Plasma-enhanced and Ozone-based Atomic Layer Deposition.” In Atomic Layer Deposition, 10th International Conference, Abstracts.
Chicago author-date (all authors)
Dendooven, Jolien, Davy Deduytsche, Jan Musschoot, and Christophe Detavernier. 2010. “Conformality of Al2O3 Deposited by Thermal, Plasma-enhanced and Ozone-based Atomic Layer Deposition.” In Atomic Layer Deposition, 10th International Conference, Abstracts.
Vancouver
1.
Dendooven J, Deduytsche D, Musschoot J, Detavernier C. Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition. Atomic Layer Deposition, 10th International conference, Abstracts. 2010.
IEEE
[1]
J. Dendooven, D. Deduytsche, J. Musschoot, and C. Detavernier, “Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition,” in Atomic Layer Deposition, 10th International conference, Abstracts, Seoul, South Korea, 2010.
@inproceedings{1245382,
  author       = {Dendooven, Jolien and Deduytsche, Davy and Musschoot, Jan and Detavernier, Christophe},
  booktitle    = {Atomic Layer Deposition, 10th International conference, Abstracts},
  language     = {eng},
  location     = {Seoul, South Korea},
  title        = {Conformality of Al2O3 deposited by thermal, plasma-enhanced and ozone-based atomic layer deposition},
  year         = {2010},
}