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The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films

(2010) MICROELECTRONIC ENGINEERING. 87(12). p.2535-2539
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Copper film, Agglomeration, Diffusion barrier, Twin, METALLIZATION, CU FILMS

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Citation

Please use this url to cite or link to this publication:

Chicago
Xie, Qi, Yu-Long Jiang, Koen De Keyser, Christophe Detavernier, Davy Deduytsche, Guo-Ping Ru, Xin-Ping Qu, and KN Tu. 2010. “The Effect of Sputtered W-based Carbide Diffusion Barriers on the Thermal Stability and Void Formation in Copper Thin Films.” Microelectronic Engineering 87 (12): 2535–2539.
APA
Xie, Qi, Jiang, Y.-L., De Keyser, K., Detavernier, C., Deduytsche, D., Ru, G.-P., Qu, X.-P., et al. (2010). The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films. MICROELECTRONIC ENGINEERING, 87(12), 2535–2539.
Vancouver
1.
Xie Q, Jiang Y-L, De Keyser K, Detavernier C, Deduytsche D, Ru G-P, et al. The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films. MICROELECTRONIC ENGINEERING. 2010;87(12):2535–9.
MLA
Xie, Qi, Yu-Long Jiang, Koen De Keyser, et al. “The Effect of Sputtered W-based Carbide Diffusion Barriers on the Thermal Stability and Void Formation in Copper Thin Films.” MICROELECTRONIC ENGINEERING 87.12 (2010): 2535–2539. Print.
@article{1226863,
  author       = {Xie, Qi and Jiang, Yu-Long and De Keyser, Koen and Detavernier, Christophe and Deduytsche, Davy and Ru, Guo-Ping and Qu, Xin-Ping and Tu, KN},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  keyword      = {Copper film,Agglomeration,Diffusion barrier,Twin,METALLIZATION,CU FILMS},
  language     = {eng},
  number       = {12},
  pages        = {2535--2539},
  title        = {The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films},
  url          = {http://dx.doi.org/10.1016/j.mee.2010.06.015},
  volume       = {87},
  year         = {2010},
}

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