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Phase formation and texture of nickel silicides on Si1-xCx epilayers

(2011) MICROELECTRONIC ENGINEERING. 88(5). p.536-540
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Keywords
Silicide, Thermal stability, Carbon, Phase formation, Texture, ENHANCEMENT

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Citation

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MLA
De Keyser, Koen, Bob De Schutter, Christophe Detavernier, et al. “Phase Formation and Texture of Nickel Silicides on Si1-xCx Epilayers.” MICROELECTRONIC ENGINEERING 88.5 (2011): 536–540. Print.
APA
De Keyser, Koen, De Schutter, B., Detavernier, C., Machkaoutsan, V., Bauer, M., Thomas, S., Sweet, J., et al. (2011). Phase formation and texture of nickel silicides on Si1-xCx epilayers. MICROELECTRONIC ENGINEERING, 88(5), 536–540. Presented at the International workshop on Materials for Advanced Metallization (MAM 2010).
Chicago author-date
De Keyser, Koen, Bob De Schutter, Christophe Detavernier, V Machkaoutsan, M Bauer, SG Thomas, JJ Sweet, and C Lavoie. 2011. “Phase Formation and Texture of Nickel Silicides on Si1-xCx Epilayers.” Microelectronic Engineering 88 (5): 536–540.
Chicago author-date (all authors)
De Keyser, Koen, Bob De Schutter, Christophe Detavernier, V Machkaoutsan, M Bauer, SG Thomas, JJ Sweet, and C Lavoie. 2011. “Phase Formation and Texture of Nickel Silicides on Si1-xCx Epilayers.” Microelectronic Engineering 88 (5): 536–540.
Vancouver
1.
De Keyser K, De Schutter B, Detavernier C, Machkaoutsan V, Bauer M, Thomas S, et al. Phase formation and texture of nickel silicides on Si1-xCx epilayers. MICROELECTRONIC ENGINEERING. 2011;88(5):536–40.
IEEE
[1]
K. De Keyser et al., “Phase formation and texture of nickel silicides on Si1-xCx epilayers,” MICROELECTRONIC ENGINEERING, vol. 88, no. 5, pp. 536–540, 2011.
@article{1226741,
  author       = {De Keyser, Koen and De Schutter, Bob and Detavernier, Christophe and Machkaoutsan, V and Bauer, M and Thomas, SG and Sweet, JJ and Lavoie, C},
  issn         = {0167-9317},
  journal      = {MICROELECTRONIC ENGINEERING},
  keywords     = {Silicide,Thermal stability,Carbon,Phase formation,Texture,ENHANCEMENT},
  language     = {eng},
  location     = {Mechelen, Belgium},
  number       = {5},
  pages        = {536--540},
  title        = {Phase formation and texture of nickel silicides on Si1-xCx epilayers},
  url          = {http://dx.doi.org/10.1016/j.mee.2010.06.010},
  volume       = {88},
  year         = {2011},
}

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