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Model Based Predictive Control in RTP Semiconductor Manufacturing

Robain De Keyser UGent and J DONALD III (1999) International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641
language
English
UGent publication?
yes
classification
C1
id
117785
handle
http://hdl.handle.net/1854/LU-117785
date created
2004-01-14 13:35:00
date last changed
2016-12-19 15:36:12
@inproceedings{117785,
  author       = {De Keyser, Robain and DONALD III, J},
  booktitle    = {International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641},
  language     = {eng},
  title        = {Model Based Predictive Control in RTP Semiconductor Manufacturing},
  year         = {1999},
}

Chicago
De Keyser, Robain, and J DONALD III. 1999. “Model Based Predictive Control in RTP Semiconductor Manufacturing.” In International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641.
APA
De Keyser, Robain, & DONALD III, J. (1999). Model Based Predictive Control in RTP Semiconductor Manufacturing. International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641.
Vancouver
1.
De Keyser R, DONALD III J. Model Based Predictive Control in RTP Semiconductor Manufacturing. International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641. 1999.
MLA
De Keyser, Robain, and J DONALD III. “Model Based Predictive Control in RTP Semiconductor Manufacturing.” International Conference on Control Applications, Kohala Coast-Island, Hawaii, August 22-27, 1999; IEEE, 1636-1641. 1999. Print.