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Silicon-on-insulator spectral filters fabricated with CMOS technology

Wim Bogaerts (UGent) , shankar kumar Selvaraja (UGent) , Pieter Dumon (UGent) , Joost Brouckaert (UGent) , Katrien De Vos (UGent) , Dries Van Thourhout (UGent) and Roel Baets (UGent)
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Abstract
We give an overview of recent progress in passive spectral filters and demultiplexers based on silicon-on-insulator photonic wire waveguides: ring resonators, interferometers, arrayed waveguide gratings, and echelle diffraction gratings, all benefit from the high-index contrast possible with silicon photonics. We show how the current generation of devices has improved crosstalk levels, insertion loss, and uniformity due to an improved fabrication process based on 193 nm lithography.
Keywords
nanophotonics, silicon photonics, echelle grating, Arrayed waveguide grating (AWG), ring resonator, silicon-on-insulator (SOI), planar concave grating (PCG), photonic wire, NANOPHOTONIC WAVE-GUIDES, CONCAVE GRATING DEMULTIPLEXER, DEEP UV LITHOGRAPHY, PHOTONIC WIRES, MICRORING RESONATOR, RING RESONATORS, ULTRA-COMPACT, CHIP, CROSSINGS, CIRCUITS

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MLA
Bogaerts, Wim, shankar kumar Selvaraja, Pieter Dumon, et al. “Silicon-on-insulator Spectral Filters Fabricated with CMOS Technology.” IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 16.1 (2010): 33–44. Print.
APA
Bogaerts, Wim, Selvaraja, shankar kumar, Dumon, P., Brouckaert, J., De Vos, K., Van Thourhout, D., & Baets, R. (2010). Silicon-on-insulator spectral filters fabricated with CMOS technology. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 16(1), 33–44.
Chicago author-date
Bogaerts, Wim, shankar kumar Selvaraja, Pieter Dumon, Joost Brouckaert, Katrien De Vos, Dries Van Thourhout, and Roel Baets. 2010. “Silicon-on-insulator Spectral Filters Fabricated with CMOS Technology.” Ieee Journal of Selected Topics in Quantum Electronics 16 (1): 33–44.
Chicago author-date (all authors)
Bogaerts, Wim, shankar kumar Selvaraja, Pieter Dumon, Joost Brouckaert, Katrien De Vos, Dries Van Thourhout, and Roel Baets. 2010. “Silicon-on-insulator Spectral Filters Fabricated with CMOS Technology.” Ieee Journal of Selected Topics in Quantum Electronics 16 (1): 33–44.
Vancouver
1.
Bogaerts W, Selvaraja shankar kumar, Dumon P, Brouckaert J, De Vos K, Van Thourhout D, et al. Silicon-on-insulator spectral filters fabricated with CMOS technology. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS. 2010;16(1):33–44.
IEEE
[1]
W. Bogaerts et al., “Silicon-on-insulator spectral filters fabricated with CMOS technology,” IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, vol. 16, no. 1, pp. 33–44, 2010.
@article{1143611,
  abstract     = {We give an overview of recent progress in passive spectral filters and demultiplexers based on silicon-on-insulator photonic wire waveguides: ring resonators, interferometers, arrayed waveguide gratings, and echelle diffraction gratings, all benefit from the high-index contrast possible with silicon photonics. We show how the current generation of devices has improved crosstalk levels, insertion loss, and uniformity due to an improved fabrication process based on 193 nm lithography.},
  author       = {Bogaerts, Wim and Selvaraja, shankar kumar and Dumon, Pieter and Brouckaert, Joost and De Vos, Katrien and Van Thourhout, Dries and Baets, Roel},
  issn         = {1077-260X},
  journal      = {IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS},
  keywords     = {nanophotonics,silicon photonics,echelle grating,Arrayed waveguide grating (AWG),ring resonator,silicon-on-insulator (SOI),planar concave grating (PCG),photonic wire,NANOPHOTONIC WAVE-GUIDES,CONCAVE GRATING DEMULTIPLEXER,DEEP UV LITHOGRAPHY,PHOTONIC WIRES,MICRORING RESONATOR,RING RESONATORS,ULTRA-COMPACT,CHIP,CROSSINGS,CIRCUITS},
  language     = {eng},
  number       = {1},
  pages        = {33--44},
  title        = {Silicon-on-insulator spectral filters fabricated with CMOS technology},
  url          = {http://dx.doi.org/10.1109/JSTQE.2009.2039680},
  volume       = {16},
  year         = {2010},
}

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