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Formation and characterization of spe grown ultra-thin cobalt disilicide film.

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Chicago
RU, GP, LI BING-ZONG, Christophe Detavernier, R VANMEIRHAEGHE, and Felix Cardon. 1999. “Formation and Characterization of Spe Grown Ultra-thin Cobalt Disilicide Film.” In Materials Research Society Symposium Proceedings, 564, 1999, 157–162.
APA
RU, G., BING-ZONG, L., Detavernier, C., VANMEIRHAEGHE, R., & Cardon, F. (1999). Formation and characterization of spe grown ultra-thin cobalt disilicide film. Materials Research Society Symposium Proceedings, 564, 1999 (pp. 157–162).
Vancouver
1.
RU G, BING-ZONG L, Detavernier C, VANMEIRHAEGHE R, Cardon F. Formation and characterization of spe grown ultra-thin cobalt disilicide film. Materials Research Society Symposium Proceedings, 564, 1999. 1999. p. 157–62.
MLA
RU, GP, LI BING-ZONG, Christophe Detavernier, et al. “Formation and Characterization of Spe Grown Ultra-thin Cobalt Disilicide Film.” Materials Research Society Symposium Proceedings, 564, 1999. 1999. 157–162. Print.
@inproceedings{111612,
  author       = {RU, GP and BING-ZONG, LI and Detavernier, Christophe and VANMEIRHAEGHE, R and Cardon, Felix},
  booktitle    = {Materials Research Society Symposium Proceedings, 564, 1999},
  language     = {eng},
  pages        = {157--162},
  title        = {Formation and characterization of spe grown ultra-thin cobalt disilicide film.},
  year         = {1999},
}