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In search for the limits of rotating cylindrical magnetron sputtering

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Roger De Gryse (UGent) and Diederik Depla (UGent)
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Please use this url to cite or link to this publication:

MLA
Leroy, Wouter, Stijn Mahieu, Roger De Gryse, et al. “In Search for the Limits of Rotating Cylindrical Magnetron Sputtering.” Magnetron, Ion Processing and Arc Technologies European Conference, Abstracts. Paris, France: Société Française du Vide (SFV), 2010. Print.
APA
Leroy, W., Mahieu, S., De Gryse, R., & Depla, D. (2010). In search for the limits of rotating cylindrical magnetron sputtering. Magnetron, Ion processing and Arc Technologies European conference, Abstracts. Presented at the Magnetron, Ion processing and Arc Technologies European conference 2010 (MIATEC 2010), Paris, France: Société Française du Vide (SFV).
Chicago author-date
Leroy, Wouter, Stijn Mahieu, Roger De Gryse, and Diederik Depla. 2010. “In Search for the Limits of Rotating Cylindrical Magnetron Sputtering.” In Magnetron, Ion Processing and Arc Technologies European Conference, Abstracts. Paris, France: Société Française du Vide (SFV).
Chicago author-date (all authors)
Leroy, Wouter, Stijn Mahieu, Roger De Gryse, and Diederik Depla. 2010. “In Search for the Limits of Rotating Cylindrical Magnetron Sputtering.” In Magnetron, Ion Processing and Arc Technologies European Conference, Abstracts. Paris, France: Société Française du Vide (SFV).
Vancouver
1.
Leroy W, Mahieu S, De Gryse R, Depla D. In search for the limits of rotating cylindrical magnetron sputtering. Magnetron, Ion processing and Arc Technologies European conference, Abstracts. Paris, France: Société Française du Vide (SFV); 2010.
IEEE
[1]
W. Leroy, S. Mahieu, R. De Gryse, and D. Depla, “In search for the limits of rotating cylindrical magnetron sputtering,” in Magnetron, Ion processing and Arc Technologies European conference, Abstracts, Metz, France, 2010.
@inproceedings{1106295,
  author       = {Leroy, Wouter and Mahieu, Stijn and De Gryse, Roger and Depla, Diederik},
  booktitle    = {Magnetron, Ion processing and Arc Technologies European conference, Abstracts},
  language     = {eng},
  location     = {Metz, France},
  publisher    = {Société Française du Vide (SFV)},
  title        = {In search for the limits of rotating cylindrical magnetron sputtering},
  year         = {2010},
}