Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model
- Author
- M Yusupov, E Bultinck, Marta Martins Saraiva (UGent) , Wouter Leroy (UGent) , Diederik Depla (UGent) and A Bogaerts
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-1106239
- MLA
- Yusupov, M et al. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT, 2010. Print.
- APA
- Yusupov, M., Bultinck, E., Martins Saraiva, M., Leroy, W., Depla, D., & Bogaerts, A. (2010). Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Presented at the 9th International conference on Reactive Sputter Deposition (RSD 2010), Ghent, Belgium: Ghent University. Research group DRAFT.
- Chicago author-date
- Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
- Chicago author-date (all authors)
- Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
- Vancouver
- 1.Yusupov M, Bultinck E, Martins Saraiva M, Leroy W, Depla D, Bogaerts A. Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT; 2010.
- IEEE
- [1]M. Yusupov, E. Bultinck, M. Martins Saraiva, W. Leroy, D. Depla, and A. Bogaerts, “Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model,” in Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition, Ghent, Belgium, 2010.
@inproceedings{1106239,
articleno = {abstract P5},
author = {Yusupov, M and Bultinck, E and Martins Saraiva, Marta and Leroy, Wouter and Depla, Diederik and Bogaerts, A},
booktitle = {Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition},
language = {eng},
location = {Ghent, Belgium},
pages = {1},
publisher = {Ghent University. Research group DRAFT},
title = {Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model},
year = {2010},
}