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Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model

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MLA
Yusupov, M et al. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT, 2010. Print.
APA
Yusupov, M., Bultinck, E., Martins Saraiva, M., Leroy, W., Depla, D., & Bogaerts, A. (2010). Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Presented at the 9th International conference on Reactive Sputter Deposition (RSD 2010), Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date
Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date (all authors)
Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Vancouver
1.
Yusupov M, Bultinck E, Martins Saraiva M, Leroy W, Depla D, Bogaerts A. Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT; 2010.
IEEE
[1]
M. Yusupov, E. Bultinck, M. Martins Saraiva, W. Leroy, D. Depla, and A. Bogaerts, “Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model,” in Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition, Ghent, Belgium, 2010.
@inproceedings{1106239,
  articleno    = {abstract P5},
  author       = {Yusupov, M and Bultinck, E and Martins Saraiva, Marta and Leroy, Wouter and Depla, Diederik and Bogaerts, A},
  booktitle    = {Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition},
  language     = {eng},
  location     = {Ghent, Belgium},
  pages        = {1},
  publisher    = {Ghent University. Research group DRAFT},
  title        = {Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model},
  year         = {2010},
}