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Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model

M Yusupov, E Bultinck, Marta Martins Saraiva (UGent) , Wouter Leroy (UGent) , Diederik Depla (UGent) and A Bogaerts
(2010) Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition.
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MLA
Yusupov, M., et al. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition, Ghent University. Research group DRAFT, 2010.
APA
Yusupov, M., Bultinck, E., Martins Saraiva, M., Leroy, W., Depla, D., & Bogaerts, A. (2010). Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. In Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date
Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date (all authors)
Yusupov, M, E Bultinck, Marta Martins Saraiva, Wouter Leroy, Diederik Depla, and A Bogaerts. 2010. “Simulation of an Ar/O2 Magnetron Discharge in Single and Dual Configurations with a Hybrid Model.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Vancouver
1.
Yusupov M, Bultinck E, Martins Saraiva M, Leroy W, Depla D, Bogaerts A. Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model. In: Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT; 2010.
IEEE
[1]
M. Yusupov, E. Bultinck, M. Martins Saraiva, W. Leroy, D. Depla, and A. Bogaerts, “Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model,” in Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition, Ghent, Belgium, 2010.
@inproceedings{1106239,
  articleno    = {{abstract P5}},
  author       = {{Yusupov, M and Bultinck, E and Martins Saraiva, Marta and Leroy, Wouter and Depla, Diederik and Bogaerts, A}},
  booktitle    = {{Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition}},
  language     = {{eng}},
  location     = {{Ghent, Belgium}},
  pages        = {{1}},
  publisher    = {{Ghent University. Research group DRAFT}},
  title        = {{Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model}},
  year         = {{2010}},
}