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Powder mixtures as deposition targets for multicomponent thin films: a case study

Francis Boydens (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)
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MLA
Boydens, Francis, et al. “Powder Mixtures as Deposition Targets for Multicomponent Thin Films: A Case Study.” Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition, Ghent University. Research group DRAFT, 2010.
APA
Boydens, F., Leroy, W., & Depla, D. (2010). Powder mixtures as deposition targets for multicomponent thin films: a case study. In Reactive sputter deposition 2010 : ninth international conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date
Boydens, Francis, Wouter Leroy, and Diederik Depla. 2010. “Powder Mixtures as Deposition Targets for Multicomponent Thin Films: A Case Study.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Chicago author-date (all authors)
Boydens, Francis, Wouter Leroy, and Diederik Depla. 2010. “Powder Mixtures as Deposition Targets for Multicomponent Thin Films: A Case Study.” In Reactive Sputter Deposition 2010 : Ninth International Conference on Reactive Sputter Deposition. Ghent, Belgium: Ghent University. Research group DRAFT.
Vancouver
1.
Boydens F, Leroy W, Depla D. Powder mixtures as deposition targets for multicomponent thin films: a case study. In: Reactive sputter deposition 2010 : ninth international conference on reactive sputter deposition. Ghent, Belgium: Ghent University. Research group DRAFT; 2010.
IEEE
[1]
F. Boydens, W. Leroy, and D. Depla, “Powder mixtures as deposition targets for multicomponent thin films: a case study,” in Reactive sputter deposition 2010 : ninth international conference on reactive sputter deposition, Ghent, Belgium, 2010.
@inproceedings{1106225,
  articleno    = {abstract S2.CA.4},
  author       = {Boydens, Francis and Leroy, Wouter and Depla, Diederik},
  booktitle    = {Reactive sputter deposition 2010 : ninth international conference on reactive sputter deposition},
  language     = {eng},
  location     = {Ghent, Belgium},
  publisher    = {Ghent University. Research group DRAFT},
  title        = {Powder mixtures as deposition targets for multicomponent thin films: a case study},
  year         = {2010},
}