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Linking reactive sputtering models to experimental reality by determining the real-time parameters

Wouter Leroy (UGent) , Koen Van Aeken (UGent) , Koen Strijckmans (UGent) , Stijn Mahieu (UGent) , Rosita Persoons and Diederik Depla (UGent)
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Chicago
Leroy, Wouter, Koen Van Aeken, Koen Strijckmans, Stijn Mahieu, Rosita Persoons, and Diederik Depla. 2009. “Linking Reactive Sputtering Models to Experimental Reality by Determining the Real-time Parameters.” In International Symposium on Reactive Sputter Deposition, RSD2009 : Programme and Book of Abstracts. Manchester, UK: University of Manchester.
APA
Leroy, W., Van Aeken, K., Strijckmans, K., Mahieu, S., Persoons, R., & Depla, D. (2009). Linking reactive sputtering models to experimental reality by determining the real-time parameters. International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts. Presented at the International symposium on Reactive Sputter Deposition (RSD 2009), Manchester, UK: University of Manchester.
Vancouver
1.
Leroy W, Van Aeken K, Strijckmans K, Mahieu S, Persoons R, Depla D. Linking reactive sputtering models to experimental reality by determining the real-time parameters. International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts. Manchester, UK: University of Manchester; 2009.
MLA
Leroy, Wouter, Koen Van Aeken, Koen Strijckmans, et al. “Linking Reactive Sputtering Models to Experimental Reality by Determining the Real-time Parameters.” International Symposium on Reactive Sputter Deposition, RSD2009 : Programme and Book of Abstracts. Manchester, UK: University of Manchester, 2009. Print.
@inproceedings{1106220,
  articleno    = {abstract Invited 3},
  author       = {Leroy, Wouter and Van Aeken, Koen and Strijckmans, Koen and Mahieu, Stijn and Persoons, Rosita and Depla, Diederik},
  booktitle    = {International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts},
  language     = {eng},
  location     = {Manchester, UK},
  publisher    = {University of Manchester},
  title        = {Linking reactive sputtering models to experimental reality by determining the real-time parameters},
  year         = {2009},
}