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Linking reactive sputtering models to experimental reality by determining the real-time parameters

Wouter Leroy UGent, Koen Van Aeken UGent, Koen Strijckmans UGent, Stijn Mahieu UGent, Rosita Persoons and Diederik Depla UGent (2009) International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts
article number
abstract Invited 3
publisher
University of Manchester
place of publication
Manchester, UK
conference name
International symposium on Reactive Sputter Deposition (RSD 2009)
conference location
Manchester, UK
conference start
2009-12-10
conference end
2009-12-11
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
1106220
handle
http://hdl.handle.net/1854/LU-1106220
date created
2011-01-20 15:21:00
date last changed
2017-01-02 09:52:20
@inproceedings{1106220,
  articleno    = {abstract Invited 3},
  author       = {Leroy, Wouter and Van Aeken, Koen and Strijckmans, Koen and Mahieu, Stijn and Persoons, Rosita and Depla, Diederik},
  booktitle    = {International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts},
  language     = {eng},
  location     = {Manchester, UK},
  publisher    = {University of Manchester},
  title        = {Linking reactive sputtering models to experimental reality by determining the real-time parameters},
  year         = {2009},
}

Chicago
Leroy, Wouter, Koen Van Aeken, Koen Strijckmans, Stijn Mahieu, Rosita Persoons, and Diederik Depla. 2009. “Linking Reactive Sputtering Models to Experimental Reality by Determining the Real-time Parameters.” In International Symposium on Reactive Sputter Deposition, RSD2009 : Programme and Book of Abstracts. Manchester, UK: University of Manchester.
APA
Leroy, W., Van Aeken, K., Strijckmans, K., Mahieu, S., Persoons, R., & Depla, D. (2009). Linking reactive sputtering models to experimental reality by determining the real-time parameters. International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts. Presented at the International symposium on Reactive Sputter Deposition (RSD 2009), Manchester, UK: University of Manchester.
Vancouver
1.
Leroy W, Van Aeken K, Strijckmans K, Mahieu S, Persoons R, Depla D. Linking reactive sputtering models to experimental reality by determining the real-time parameters. International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts. Manchester, UK: University of Manchester; 2009.
MLA
Leroy, Wouter, Koen Van Aeken, Koen Strijckmans, et al. “Linking Reactive Sputtering Models to Experimental Reality by Determining the Real-time Parameters.” International Symposium on Reactive Sputter Deposition, RSD2009 : Programme and Book of Abstracts. Manchester, UK: University of Manchester, 2009. Print.