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Depositing aluminium oxide to study reactive magnetron sputtering

Wouter Leroy UGent, Stijn Mahieu UGent and Diederik Depla UGent (2007) International symposium of reactive sputter deposition. p.25-25
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
International symposium of reactive sputter deposition
pages
25 - 25
publisher
Montanuniversität Leoben
place of publication
Leoben, Austria
conference name
International symposium of Reactive Sputter Deposition
conference location
Leoben, Austria
conference start
2007-12-06
conference end
2007-12-07
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
1106212
handle
http://hdl.handle.net/1854/LU-1106212
date created
2011-01-20 15:18:41
date last changed
2017-01-02 09:52:32
@inproceedings{1106212,
  author       = {Leroy, Wouter and Mahieu, Stijn and Depla, Diederik},
  booktitle    = {International symposium of reactive sputter deposition},
  language     = {eng},
  location     = {Leoben, Austria},
  pages        = {25--25},
  publisher    = {Montanuniversit{\"a}t Leoben},
  title        = {Depositing aluminium oxide to study reactive magnetron sputtering},
  year         = {2007},
}

Chicago
Leroy, Wouter, Stijn Mahieu, and Diederik Depla. 2007. “Depositing Aluminium Oxide to Study Reactive Magnetron Sputtering.” In International Symposium of Reactive Sputter Deposition, 25–25. Leoben, Austria: Montanuniversität Leoben.
APA
Leroy, W., Mahieu, S., & Depla, D. (2007). Depositing aluminium oxide to study reactive magnetron sputtering. International symposium of reactive sputter deposition (pp. 25–25). Presented at the International symposium of Reactive Sputter Deposition, Leoben, Austria: Montanuniversität Leoben.
Vancouver
1.
Leroy W, Mahieu S, Depla D. Depositing aluminium oxide to study reactive magnetron sputtering. International symposium of reactive sputter deposition. Leoben, Austria: Montanuniversität Leoben; 2007. p. 25–25.
MLA
Leroy, Wouter, Stijn Mahieu, and Diederik Depla. “Depositing Aluminium Oxide to Study Reactive Magnetron Sputtering.” International Symposium of Reactive Sputter Deposition. Leoben, Austria: Montanuniversität Leoben, 2007. 25–25. Print.