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Depositing aluminium oxide to study reactive magnetron sputtering

Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)
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Chicago
Leroy, Wouter, Stijn Mahieu, and Diederik Depla. 2007. “Depositing Aluminium Oxide to Study Reactive Magnetron Sputtering.” In International Symposium of Reactive Sputter Deposition, 25–25. Leoben, Austria: Montanuniversität Leoben.
APA
Leroy, W., Mahieu, S., & Depla, D. (2007). Depositing aluminium oxide to study reactive magnetron sputtering. International symposium of reactive sputter deposition (pp. 25–25). Presented at the International symposium of Reactive Sputter Deposition, Leoben, Austria: Montanuniversität Leoben.
Vancouver
1.
Leroy W, Mahieu S, Depla D. Depositing aluminium oxide to study reactive magnetron sputtering. International symposium of reactive sputter deposition. Leoben, Austria: Montanuniversität Leoben; 2007. p. 25–25.
MLA
Leroy, Wouter, Stijn Mahieu, and Diederik Depla. “Depositing Aluminium Oxide to Study Reactive Magnetron Sputtering.” International Symposium of Reactive Sputter Deposition. Leoben, Austria: Montanuniversität Leoben, 2007. 25–25. Print.
@inproceedings{1106212,
  author       = {Leroy, Wouter and Mahieu, Stijn and Depla, Diederik},
  booktitle    = {International symposium of reactive sputter deposition},
  language     = {eng},
  location     = {Leoben, Austria},
  pages        = {25--25},
  publisher    = {Montanuniversit{\"a}t Leoben},
  title        = {Depositing aluminium oxide to study reactive magnetron sputtering},
  year         = {2007},
}