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Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Rosita Persoons and Diederik Depla (UGent)
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MLA
Leroy, Wouter, Stijn Mahieu, Rosita Persoons, et al. “Analysis of the Behaviour of the Reactive Species in Reactive Magnetron Sputtering of Oxides.” Twelfth International Conference on Plasma Surface Engineering : Abstracts. European Society of Thin Films, 2010. 521–521. Print.
APA
Leroy, W., Mahieu, S., Persoons, R., & Depla, D. (2010). Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides. Twelfth international conference on plasma surface engineering : abstracts (pp. 521–521). Presented at the 12th International conference on Plasma Surface Engineering (PSE 2010), European Society of Thin Films.
Chicago author-date
Leroy, Wouter, Stijn Mahieu, Rosita Persoons, and Diederik Depla. 2010. “Analysis of the Behaviour of the Reactive Species in Reactive Magnetron Sputtering of Oxides.” In Twelfth International Conference on Plasma Surface Engineering : Abstracts, 521–521. European Society of Thin Films.
Chicago author-date (all authors)
Leroy, Wouter, Stijn Mahieu, Rosita Persoons, and Diederik Depla. 2010. “Analysis of the Behaviour of the Reactive Species in Reactive Magnetron Sputtering of Oxides.” In Twelfth International Conference on Plasma Surface Engineering : Abstracts, 521–521. European Society of Thin Films.
Vancouver
1.
Leroy W, Mahieu S, Persoons R, Depla D. Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides. Twelfth international conference on plasma surface engineering : abstracts. European Society of Thin Films; 2010. p. 521–521.
IEEE
[1]
W. Leroy, S. Mahieu, R. Persoons, and D. Depla, “Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides,” in Twelfth international conference on plasma surface engineering : abstracts, Garmisch-Partenkirchen, Germany, 2010, pp. 521–521.
@inproceedings{1106207,
  articleno    = {abstract PO4029},
  author       = {Leroy, Wouter and Mahieu, Stijn and Persoons, Rosita and Depla, Diederik},
  booktitle    = {Twelfth international conference on plasma surface engineering : abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  pages        = {abstract PO4029:521--abstract PO4029:521},
  publisher    = {European Society of Thin Films},
  title        = {Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides},
  year         = {2010},
}