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Fixing the parameter set for reactive sputtering modelling

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Chicago
Strijckmans, Koen, Wouter Leroy, Anemie Bogaerts, and Diederik Depla. 2010. “Fixing the Parameter Set for Reactive Sputtering Modelling.” In Twelfth International Conference on Plasma Surface Engineering : Abstracts, 588–588. European Society of Thin Films.
APA
Strijckmans, Koen, Leroy, W., Bogaerts, A., & Depla, D. (2010). Fixing the parameter set for reactive sputtering modelling. Twelfth international conference on plasma surface engineering : abstracts (pp. 588–588). Presented at the 12th International conference on Plasma Surface Engineering (PSE 2010), European Society of Thin Films.
Vancouver
1.
Strijckmans K, Leroy W, Bogaerts A, Depla D. Fixing the parameter set for reactive sputtering modelling. Twelfth international conference on plasma surface engineering : abstracts. European Society of Thin Films; 2010. p. 588–588.
MLA
Strijckmans, Koen, Wouter Leroy, Anemie Bogaerts, et al. “Fixing the Parameter Set for Reactive Sputtering Modelling.” Twelfth International Conference on Plasma Surface Engineering : Abstracts. European Society of Thin Films, 2010. 588–588. Print.
@inproceedings{1106197,
  articleno    = {abstract PO4096},
  author       = {Strijckmans, Koen and Leroy, Wouter and Bogaerts, Anemie and Depla, Diederik},
  booktitle    = {Twelfth international conference on plasma surface engineering : abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  pages        = {abstract PO4096:588--abstract PO4096:588},
  publisher    = {European Society of Thin Films},
  title        = {Fixing the parameter set for reactive sputtering modelling},
  year         = {2010},
}