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Fixing the parameter set for reactive sputtering modelling

Koen Strijckmans UGent, Wouter Leroy UGent, Anemie Bogaerts and Diederik Depla UGent (2010) Twelfth international conference on plasma surface engineering : abstracts. p.588-588
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Twelfth international conference on plasma surface engineering : abstracts
article number
abstract PO4096
pages
588 - 588
publisher
European Society of Thin Films
conference name
12th International conference on Plasma Surface Engineering (PSE 2010)
conference location
Garmisch-Partenkirchen, Germany
conference start
2010-09-13
conference end
2010-09-17
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
1106197
handle
http://hdl.handle.net/1854/LU-1106197
date created
2011-01-20 15:14:23
date last changed
2016-12-21 15:40:42
@inproceedings{1106197,
  articleno    = {abstract PO4096},
  author       = {Strijckmans, Koen and Leroy, Wouter and Bogaerts, Anemie and Depla, Diederik},
  booktitle    = {Twelfth international conference on plasma surface engineering : abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  pages        = {abstract PO4096:588--abstract PO4096:588},
  publisher    = {European Society of Thin Films},
  title        = {Fixing the parameter set for reactive sputtering modelling},
  year         = {2010},
}

Chicago
Strijckmans, Koen, Wouter Leroy, Anemie Bogaerts, and Diederik Depla. 2010. “Fixing the Parameter Set for Reactive Sputtering Modelling.” In Twelfth International Conference on Plasma Surface Engineering : Abstracts, 588–588. European Society of Thin Films.
APA
Strijckmans, Koen, Leroy, W., Bogaerts, A., & Depla, D. (2010). Fixing the parameter set for reactive sputtering modelling. Twelfth international conference on plasma surface engineering : abstracts (pp. 588–588). Presented at the 12th International conference on Plasma Surface Engineering (PSE 2010), European Society of Thin Films.
Vancouver
1.
Strijckmans K, Leroy W, Bogaerts A, Depla D. Fixing the parameter set for reactive sputtering modelling. Twelfth international conference on plasma surface engineering : abstracts. European Society of Thin Films; 2010. p. 588–588.
MLA
Strijckmans, Koen, Wouter Leroy, Anemie Bogaerts, et al. “Fixing the Parameter Set for Reactive Sputtering Modelling.” Twelfth International Conference on Plasma Surface Engineering : Abstracts. European Society of Thin Films, 2010. 588–588. Print.