Ghent University Academic Bibliography

Advanced

Some more equations describing reactive magnetron sputtering

Diederik Depla UGent, Stijn Mahieu UGent, Wouter Leroy UGent, Johan Haemers UGent and Roger De Gryse UGent (2008) Eleventh international conference on plasma surface engineering : abstracts. p.71-71
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Eleventh international conference on plasma surface engineering : abstracts
article number
abstract KN1000
pages
71 - 71
publisher
European Society of Thin Films
conference name
11th International conference on Plasma Surface Engineering (PSE 2008)
conference location
Garmisch-Partenkirchen, Germany
conference start
2008-09-15
conference end
2008-09-19
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
1106174
handle
http://hdl.handle.net/1854/LU-1106174
date created
2011-01-20 15:04:49
date last changed
2016-12-21 15:40:40
@inproceedings{1106174,
  articleno    = {abstract KN1000},
  author       = {Depla, Diederik and Mahieu, Stijn and Leroy, Wouter and Haemers, Johan and De Gryse, Roger},
  booktitle    = {Eleventh international conference on plasma surface engineering : abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  pages        = {abstract KN1000:71--abstract KN1000:71},
  publisher    = {European Society of Thin Films},
  title        = {Some more equations describing reactive magnetron sputtering},
  year         = {2008},
}

Chicago
Depla, Diederik, Stijn Mahieu, Wouter Leroy, Johan Haemers, and Roger De Gryse. 2008. “Some More Equations Describing Reactive Magnetron Sputtering.” In Eleventh International Conference on Plasma Surface Engineering : Abstracts, 71–71. European Society of Thin Films.
APA
Depla, D., Mahieu, S., Leroy, W., Haemers, J., & De Gryse, R. (2008). Some more equations describing reactive magnetron sputtering. Eleventh international conference on plasma surface engineering : abstracts (pp. 71–71). Presented at the 11th International conference on Plasma Surface Engineering (PSE 2008), European Society of Thin Films.
Vancouver
1.
Depla D, Mahieu S, Leroy W, Haemers J, De Gryse R. Some more equations describing reactive magnetron sputtering. Eleventh international conference on plasma surface engineering : abstracts. European Society of Thin Films; 2008. p. 71–71.
MLA
Depla, Diederik, Stijn Mahieu, Wouter Leroy, et al. “Some More Equations Describing Reactive Magnetron Sputtering.” Eleventh International Conference on Plasma Surface Engineering : Abstracts. European Society of Thin Films, 2008. 71–71. Print.