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Some more equations describing reactive magnetron sputtering

Diederik Depla (UGent) , Stijn Mahieu (UGent) , Wouter Leroy (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)
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Chicago
Depla, Diederik, Stijn Mahieu, Wouter Leroy, Johan Haemers, and Roger De Gryse. 2008. “Some More Equations Describing Reactive Magnetron Sputtering.” In Eleventh International Conference on Plasma Surface Engineering : Abstracts, 71–71. European Society of Thin Films.
APA
Depla, D., Mahieu, S., Leroy, W., Haemers, J., & De Gryse, R. (2008). Some more equations describing reactive magnetron sputtering. Eleventh international conference on plasma surface engineering : abstracts (pp. 71–71). Presented at the 11th International conference on Plasma Surface Engineering (PSE 2008), European Society of Thin Films.
Vancouver
1.
Depla D, Mahieu S, Leroy W, Haemers J, De Gryse R. Some more equations describing reactive magnetron sputtering. Eleventh international conference on plasma surface engineering : abstracts. European Society of Thin Films; 2008. p. 71–71.
MLA
Depla, Diederik, Stijn Mahieu, Wouter Leroy, et al. “Some More Equations Describing Reactive Magnetron Sputtering.” Eleventh International Conference on Plasma Surface Engineering : Abstracts. European Society of Thin Films, 2008. 71–71. Print.
@inproceedings{1106174,
  articleno    = {abstract KN1000},
  author       = {Depla, Diederik and Mahieu, Stijn and Leroy, Wouter and Haemers, Johan and De Gryse, Roger},
  booktitle    = {Eleventh international conference on plasma surface engineering : abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  pages        = {abstract KN1000:71--abstract KN1000:71},
  publisher    = {European Society of Thin Films},
  title        = {Some more equations describing reactive magnetron sputtering},
  year         = {2008},
}