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Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008)

Stijn Mahieu UGent, Wouter Leroy UGent, Diederik Depla UGent, Sepp Schreiber and Wolfhard Moller (2009) APPLIED PHYSICS LETTERS. 94(6).
Please use this url to cite or link to this publication:
author
organization
year
type
misc (correction)
publication status
published
subject
keyword
SIMULATION, DAMAGE, LOW-ENERGY IONS, BEHAVIOR, DIFFUSION, MODEL
in
APPLIED PHYSICS LETTERS
Appl. Phys. Lett.
volume
94
issue
6
article number
069901
pages
1 pages
Web of Science type
Correction
Web of Science id
000263409400128
JCR category
PHYSICS, APPLIED
JCR impact factor
3.554 (2009)
JCR rank
14/104 (2009)
JCR quartile
1 (2009)
ISSN
0003-6951
DOI
10.1063/1.3086270
language
English
UGent publication?
yes
classification
V
copyright statement
I have retained and own the full copyright for this publication
id
1106117
handle
http://hdl.handle.net/1854/LU-1106117
date created
2011-01-20 14:46:11
date last changed
2016-12-21 15:43:00
@misc{1106117,
  articleno    = {069901},
  author       = {Mahieu, Stijn and Leroy, Wouter and Depla, Diederik and Schreiber, Sepp and Moller, Wolfhard},
  issn         = {0003-6951},
  keyword      = {SIMULATION,DAMAGE,LOW-ENERGY IONS,BEHAVIOR,DIFFUSION,MODEL},
  language     = {eng},
  number       = {6},
  pages        = {1},
  series       = {APPLIED PHYSICS LETTERS},
  title        = {Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008)},
  url          = {http://dx.doi.org/10.1063/1.3086270},
  volume       = {94},
  year         = {2009},
}

Chicago
Mahieu, Stijn, Wouter Leroy, Diederik Depla, Sepp Schreiber, and Wolfhard Moller. 2009. “Noble Gas Retention in the Target During Rotating Cylindrical Magnetron Sputtering (vol 93, Art No 061501, 2008).” Applied Physics Letters.
APA
Mahieu, Stijn, Leroy, W., Depla, D., Schreiber, S., & Moller, W. (2009). Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008). APPLIED PHYSICS LETTERS.
Vancouver
1.
Mahieu S, Leroy W, Depla D, Schreiber S, Moller W. Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008). APPLIED PHYSICS LETTERS. 2009.
MLA
Mahieu, Stijn, Wouter Leroy, Diederik Depla, et al. “Noble Gas Retention in the Target During Rotating Cylindrical Magnetron Sputtering (vol 93, Art No 061501, 2008).” APPLIED PHYSICS LETTERS 2009 : n. pag. Print.