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Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008)

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Keywords
SIMULATION, DAMAGE, LOW-ENERGY IONS, BEHAVIOR, DIFFUSION, MODEL

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Please use this url to cite or link to this publication:

Chicago
Mahieu, Stijn, Wouter Leroy, Diederik Depla, Sepp Schreiber, and Wolfhard Moller. 2009. “Noble Gas Retention in the Target During Rotating Cylindrical Magnetron Sputtering (vol 93, Art No 061501, 2008).” Applied Physics Letters.
APA
Mahieu, Stijn, Leroy, W., Depla, D., Schreiber, S., & Moller, W. (2009). Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008). APPLIED PHYSICS LETTERS.
Vancouver
1.
Mahieu S, Leroy W, Depla D, Schreiber S, Moller W. Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008). APPLIED PHYSICS LETTERS. 2009.
MLA
Mahieu, Stijn, Wouter Leroy, Diederik Depla, et al. “Noble Gas Retention in the Target During Rotating Cylindrical Magnetron Sputtering (vol 93, Art No 061501, 2008).” APPLIED PHYSICS LETTERS 2009 : n. pag. Print.
@misc{1106117,
  articleno    = {069901},
  author       = {Mahieu, Stijn and Leroy, Wouter and Depla, Diederik and Schreiber, Sepp and Moller, Wolfhard},
  issn         = {0003-6951},
  keyword      = {SIMULATION,DAMAGE,LOW-ENERGY IONS,BEHAVIOR,DIFFUSION,MODEL},
  language     = {eng},
  number       = {6},
  pages        = {1},
  series       = {APPLIED PHYSICS LETTERS},
  title        = {Noble gas retention in the target during rotating cylindrical magnetron sputtering (vol 93, art no 061501, 2008)},
  url          = {http://dx.doi.org/10.1063/1.3086270},
  volume       = {94},
  year         = {2009},
}

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