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Citation

Please use this url to cite or link to this publication:

Chicago
Depla, Diederik, Stijn Mahieu, and Joseph Greene. 2010. “Sputter Deposition Processes.” In Handbook of Deposition Technologies for Films and Coatings : Science, Applications and Technology, ed. Peter M Martin, 253–296. 3rd ed. Oxford, UK: William Andrew.
APA
Depla, D., Mahieu, S., & Greene, J. (2010). Sputter deposition processes. In P. M. Martin (Ed.), Handbook of deposition technologies for films and coatings : science, applications and technology (3rd ed., pp. 253–296). Oxford, UK: William Andrew.
Vancouver
1.
Depla D, Mahieu S, Greene J. Sputter deposition processes. In: Martin PM, editor. Handbook of deposition technologies for films and coatings : science, applications and technology. 3rd ed. Oxford, UK: William Andrew; 2010. p. 253–96.
MLA
Depla, Diederik, Stijn Mahieu, and Joseph Greene. “Sputter Deposition Processes.” Handbook of Deposition Technologies for Films and Coatings : Science, Applications and Technology. 3rd ed. Ed. Peter M Martin. Oxford, UK: William Andrew, 2010. 253–296. Print.
@incollection{1095343,
  author       = {Depla, Diederik and Mahieu, Stijn and Greene, Joseph},
  booktitle    = {Handbook of deposition technologies for films and coatings : science, applications and technology},
  editor       = {Martin, Peter M},
  isbn         = {9780815520313},
  language     = {eng},
  pages        = {253--296},
  publisher    = {William Andrew},
  title        = {Sputter deposition processes},
  url          = {http://dx.doi.org/10.1016/B978-0-8155-2031-3.00005-3},
  year         = {2010},
}

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