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Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma

(2009) VACUUM. 83(suppl. 1). p.S140-S144
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Keywords
Plasma surface interaction, Thermal plasma, Diamond-like carbon, Chemical kinetics, Plasma chemistry, DLC growth rate, BIOCOMPATIBILITY, CHEMISTRY, REACTORS, SURFACE

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Citation

Please use this url to cite or link to this publication:

Chicago
Shokri, Babak, Maziar S Yaghmaee , Abdollah Sarani, and Ali Reza Niknam. 2009. “Chemical Kinetics Simulation of Deposition and Sp2/sp3 Bond Ratio of Diamond-like Carbon Film in Plasma.” Vacuum 83 (suppl. 1): S140–S144.
APA
Shokri, B., Yaghmaee , M. S., Sarani, A., & Niknam, A. R. (2009). Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma. VACUUM, 83(suppl. 1), S140–S144. Presented at the 8th International Conference on Ion Implantation and Other Applications of Ions and Electrons.
Vancouver
1.
Shokri B, Yaghmaee MS, Sarani A, Niknam AR. Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma. VACUUM. 2009;83(suppl. 1):S140–S144.
MLA
Shokri, Babak, Maziar S Yaghmaee , Abdollah Sarani, et al. “Chemical Kinetics Simulation of Deposition and Sp2/sp3 Bond Ratio of Diamond-like Carbon Film in Plasma.” VACUUM 83.suppl. 1 (2009): S140–S144. Print.
@article{1059762,
  author       = {Shokri, Babak and Yaghmaee , Maziar S and Sarani, Abdollah and Niknam, Ali Reza},
  issn         = {0042-207X},
  journal      = {VACUUM},
  keywords     = {Plasma surface interaction,Thermal plasma,Diamond-like carbon,Chemical kinetics,Plasma chemistry,DLC growth rate,BIOCOMPATIBILITY,CHEMISTRY,REACTORS,SURFACE},
  language     = {eng},
  location     = {Kazimierz Dolny, Poland},
  number       = {suppl. 1},
  pages        = {S140--S144},
  title        = {Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma},
  url          = {http://dx.doi.org/10.1016/j.vacuum.2009.01.047},
  volume       = {83},
  year         = {2009},
}

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