Ghent University Academic Bibliography

Advanced

Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film

Ling Fangzhou, Jeroen De Coster, Roel Beernaert UGent, Wan-Yu Lin, Jean-Pierre Celis and Ingrid de Wolf (2010) Proceedings of 21st Micromechanics and Micro Systems Europe Workshop. p.44-47
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Proceedings of 21st Micromechanics and Micro Systems Europe Workshop
pages
44 - 47
conference name
21st Micromechanics and Micro systems Europe workshop (MME - 2010)
conference location
Enschede, The Netherlands
conference start
2010-09-26
conference end
2010-09-29
language
English
UGent publication?
yes
classification
C3
id
1057243
handle
http://hdl.handle.net/1854/LU-1057243
date created
2010-10-11 11:45:12
date last changed
2011-05-23 15:10:02
@inproceedings{1057243,
  author       = {Fangzhou, Ling and De Coster, Jeroen and Beernaert, Roel and Lin, Wan-Yu and Celis, Jean-Pierre and de Wolf, Ingrid},
  booktitle    = {Proceedings of 21st Micromechanics and Micro Systems Europe Workshop},
  language     = {eng},
  location     = {Enschede, The Netherlands},
  pages        = {44--47},
  title        = {Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film},
  year         = {2010},
}

Chicago
Fangzhou, Ling, Jeroen De Coster, Roel Beernaert, Wan-Yu Lin, Jean-Pierre Celis, and Ingrid de Wolf. 2010. “Stiction Reduction in Electrostatic poly-SiGe Micromirrors by Applying a Self-assembled Monolayer Film.” In Proceedings of 21st Micromechanics and Micro Systems Europe Workshop, 44–47.
APA
Fangzhou, L., De Coster, J., Beernaert, R., Lin, W.-Y., Celis, J.-P., & de Wolf, I. (2010). Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film. Proceedings of 21st Micromechanics and Micro Systems Europe Workshop (pp. 44–47). Presented at the 21st Micromechanics and Micro systems Europe workshop (MME - 2010).
Vancouver
1.
Fangzhou L, De Coster J, Beernaert R, Lin W-Y, Celis J-P, de Wolf I. Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film. Proceedings of 21st Micromechanics and Micro Systems Europe Workshop. 2010. p. 44–7.
MLA
Fangzhou, Ling, Jeroen De Coster, Roel Beernaert, et al. “Stiction Reduction in Electrostatic poly-SiGe Micromirrors by Applying a Self-assembled Monolayer Film.” Proceedings of 21st Micromechanics and Micro Systems Europe Workshop. 2010. 44–47. Print.