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SiGe micromirrors for optical applications

Roel Beernaert UGent, Jeroen De Coster, Tomas Podprocky UGent, Ann Witvrouw, Simone Severi, Aykut Avci UGent, Jelle De Smet UGent and Herbert De Smet UGent (2010) Proceedings of SPIE, the International Society for Optical Engineering. 7750.
abstract
Micromirrors are a typical example of Micro-Electromechanical Systems (MEMS) with many applications including optical scanners, optical switching, projection displays, etc. We have succeeded in producing MEMS micromirrors in a SiGe structural layer, which can be used to realize CMOS-integrated MEMS structures. Several pixel designs were simulated using COMSOL multiphysics and subsequently verified in hardware. They differ in mirror size, hinge length and number of attracting electrodes (two or four). One particular mirror design enables variable Pulse Width Modulation (PWM) addressing. In this design, the mirror switches between two extreme states with a variable duty cycle determined by two generic high voltage signals and two CMOS-compatible pixel-specific DC voltages applied to the four attracting electrodes. The processed arrays were subjected to Laser Doppler Vibrometer (LDV) measurements in order to verify the simulation results. The simulated and measured pull-in voltages are compared for 8, 10 and 15µm mirrors. The agreement between simulation and measurement lies within the expectations, which is an encouraging result for future designs.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
keyword
micromirrors, Microelectromechanical Systems, MEMS, analog Pulse Width Modulation, SiGe
in
Proceedings of SPIE, the International Society for Optical Engineering
Proc. SPIE Int. Soc. Opt. Eng.
editor
Henry P Schriemer and Rafael N Kleiman
volume
7750
issue title
Photonics North 2010
article_number
77501S
pages
6 pages
publisher
SPIE, the International Society for Optical Engineering
place of publication
Bellingham, WA, USA
conference name
Photonics North 2010
conference location
Niagara Falls, ON, Canada
conference start
2010-06-01
conference end
2010-06-03
Web of Science type
Proceedings Paper
Web of Science id
000287707900063
ISSN
0277-786X
ISBN
9780819482419
DOI
10.1117/12.873061
language
English
UGent publication?
yes
classification
P1
copyright statement
I have transferred the copyright for this publication to the publisher
id
1055416
handle
http://hdl.handle.net/1854/LU-1055416
date created
2010-10-07 15:30:55
date last changed
2011-05-13 10:43:01
@inproceedings{1055416,
  abstract     = {Micromirrors are a typical example of Micro-Electromechanical Systems (MEMS) with many applications including optical scanners, optical switching, projection displays, etc. We have succeeded in producing MEMS micromirrors in a SiGe structural layer, which can be used to realize CMOS-integrated MEMS structures. Several pixel designs were simulated using COMSOL multiphysics and subsequently  verified in hardware. They differ in mirror size, hinge length  and number of attracting electrodes (two or four). One particular  mirror design enables variable Pulse Width Modulation (PWM) addressing. In this design, the mirror switches between two extreme states with a variable duty cycle determined by two generic high voltage signals and two CMOS-compatible pixel-specific DC voltages applied to the four attracting electrodes. The processed arrays were subjected to Laser Doppler Vibrometer (LDV) measurements in order to verify the simulation results. The simulated and measured pull-in voltages are compared for 8, 10 and 15{\textmu}m mirrors. The agreement between simulation and measurement lies within the expectations, which is an encouraging result for future designs.},
  articleno    = {77501S},
  author       = {Beernaert, Roel and De Coster, Jeroen and Podprocky, Tomas and Witvrouw, Ann and Severi, Simone and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE, the International Society for Optical Engineering},
  editor       = {Schriemer, Henry P and Kleiman, Rafael N},
  isbn         = {9780819482419},
  issn         = {0277-786X},
  keyword      = {micromirrors,Microelectromechanical Systems,MEMS,analog Pulse Width Modulation,SiGe},
  language     = {eng},
  location     = {Niagara Falls, ON, Canada},
  pages        = {6},
  publisher    = {SPIE, the International Society for Optical Engineering},
  title        = {SiGe micromirrors for optical applications},
  url          = {http://dx.doi.org/10.1117/12.873061},
  volume       = {7750},
  year         = {2010},
}

Chicago
Beernaert, Roel, Jeroen De Coster, Tomas Podprocky, Ann Witvrouw, Simone Severi, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2010. “SiGe Micromirrors for Optical Applications.” In Proceedings of SPIE, the International Society for Optical Engineering, ed. Henry P Schriemer and Rafael N Kleiman. Vol. 7750. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
APA
Beernaert, R., De Coster, J., Podprocky, T., Witvrouw, A., Severi, S., Avci, A., De Smet, J., et al. (2010). SiGe micromirrors for optical applications. In H. P. Schriemer & R. N. Kleiman (Eds.), Proceedings of SPIE, the International Society for Optical Engineering (Vol. 7750). Presented at the Photonics North 2010, Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Vancouver
1.
Beernaert R, De Coster J, Podprocky T, Witvrouw A, Severi S, Avci A, et al. SiGe micromirrors for optical applications. In: Schriemer HP, Kleiman RN, editors. Proceedings of SPIE, the International Society for Optical Engineering. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering; 2010.
MLA
Beernaert, Roel, Jeroen De Coster, Tomas Podprocky, et al. “SiGe Micromirrors for Optical Applications.” Proceedings of SPIE, the International Society for Optical Engineering. Ed. Henry P Schriemer & Rafael N Kleiman. Vol. 7750. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering, 2010. Print.