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Abstract
Micromirrors are a typical example of Micro-Electromechanical Systems (MEMS) with many applications including optical scanners, optical switching, projection displays, etc. We have succeeded in producing MEMS micromirrors in a SiGe structural layer, which can be used to realize CMOS-integrated MEMS structures. Several pixel designs were simulated using COMSOL multiphysics and subsequently verified in hardware. They differ in mirror size, hinge length and number of attracting electrodes (two or four). One particular mirror design enables variable Pulse Width Modulation (PWM) addressing. In this design, the mirror switches between two extreme states with a variable duty cycle determined by two generic high voltage signals and two CMOS-compatible pixel-specific DC voltages applied to the four attracting electrodes. The processed arrays were subjected to Laser Doppler Vibrometer (LDV) measurements in order to verify the simulation results. The simulated and measured pull-in voltages are compared for 8, 10 and 15µm mirrors. The agreement between simulation and measurement lies within the expectations, which is an encouraging result for future designs.
Keywords
micromirrors, Microelectromechanical Systems, MEMS, analog Pulse Width Modulation, SiGe

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Chicago
Beernaert, Roel, Jeroen De Coster, Tomas Podprocky, Ann Witvrouw, Simone Severi, Aykut Avci, Jelle De Smet, and Herbert De Smet. 2010. “SiGe Micromirrors for Optical Applications.” In Proceedings of SPIE, the International Society for Optical Engineering, ed. Henry P Schriemer and Rafael N Kleiman. Vol. 7750. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
APA
Beernaert, R., De Coster, J., Podprocky, T., Witvrouw, A., Severi, S., Avci, A., De Smet, J., et al. (2010). SiGe micromirrors for optical applications. In H. P. Schriemer & R. N. Kleiman (Eds.), Proceedings of SPIE, the International Society for Optical Engineering (Vol. 7750). Presented at the Photonics North 2010, Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Vancouver
1.
Beernaert R, De Coster J, Podprocky T, Witvrouw A, Severi S, Avci A, et al. SiGe micromirrors for optical applications. In: Schriemer HP, Kleiman RN, editors. Proceedings of SPIE, the International Society for Optical Engineering. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering; 2010.
MLA
Beernaert, Roel, Jeroen De Coster, Tomas Podprocky, et al. “SiGe Micromirrors for Optical Applications.” Proceedings of SPIE, the International Society for Optical Engineering. Ed. Henry P Schriemer & Rafael N Kleiman. Vol. 7750. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering, 2010. Print.
@inproceedings{1055416,
  abstract     = {Micromirrors are a typical example of Micro-Electromechanical Systems (MEMS) with many applications including optical scanners, optical switching, projection displays, etc. We have succeeded in producing MEMS micromirrors in a SiGe structural layer, which can be used to realize CMOS-integrated MEMS structures. Several pixel designs were simulated using COMSOL multiphysics and subsequently  verified in hardware. They differ in mirror size, hinge length  and number of attracting electrodes (two or four). One particular  mirror design enables variable Pulse Width Modulation (PWM) addressing. In this design, the mirror switches between two extreme states with a variable duty cycle determined by two generic high voltage signals and two CMOS-compatible pixel-specific DC voltages applied to the four attracting electrodes. The processed arrays were subjected to Laser Doppler Vibrometer (LDV) measurements in order to verify the simulation results. The simulated and measured pull-in voltages are compared for 8, 10 and 15{\textmu}m mirrors. The agreement between simulation and measurement lies within the expectations, which is an encouraging result for future designs.},
  articleno    = {77501S},
  author       = {Beernaert, Roel and De Coster, Jeroen and Podprocky, Tomas and Witvrouw, Ann and Severi, Simone and Avci, Aykut and De Smet, Jelle and De Smet, Herbert},
  booktitle    = {Proceedings of SPIE, the International Society for Optical Engineering},
  editor       = {Schriemer, Henry P and Kleiman, Rafael N},
  isbn         = {9780819482419},
  issn         = {0277-786X},
  language     = {eng},
  location     = {Niagara Falls, ON, Canada},
  pages        = {6},
  publisher    = {SPIE, the International Society for Optical Engineering},
  title        = {SiGe micromirrors for optical applications},
  url          = {http://dx.doi.org/10.1117/12.873061},
  volume       = {7750},
  year         = {2010},
}

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