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Novel analog pulse-width-modulated 15-μm SiGe micromirrors

Roel Beernaert UGent, Aykut Avci UGent, Jelle De Smet UGent, Herbert De Smet UGent, Jeroen De Coster, Simone Severi and Ann Witvrouw (2010) JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY. 18(10). p.855-861
abstract
A novel six-electrode SiGe micromirror pixel enabling analog pulse-width modulation (PWM) in display applications is presented. Instead of utilizing bitplanes, arbitrary duty cycles can be realized, resulting in an analog gray-level distribution. This eliminates the posterization (contouring) effect that is typical for digital micromirrors. Moreover, the pixel design does not require the incorporation of electronic comparators and the gamma compensation can be processed externally. Two out of the six electrodes are used as landing electrodes. The other four attracting electrodes are driven by two anti-phase saw-tooth signals and two fixed analog voltage signals. By applying this signal scheme, the duty cycle of the mirror is modulated in an analog manner. Test vehicles were manufactured where SiGe is the microelectromechanical systems (MEMS) material. The use of SiGe as a structural layer is advantageous to build MEMS since the CMOS and MEMS layers can be deposited in a monolithic manner. Measurements using a Laser Doppler Vibrometer (LDV) have confirmed the feasibility of analog PWM for 15-μm SiGe micromirrors.
Please use this url to cite or link to this publication:
author
organization
alternative title
Novel analog pulse-width-modulated 15-mu SiGe micromirrors
year
type
journalArticle (original)
publication status
published
subject
keyword
analog, pulse-width modulation, pixel, micromirror, SiGe, MEMS, Microelectromechanical systems, contouring, posterization
journal title
JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY
J. Soc. Inf. Display
volume
18
issue
10
issue title
MEMS and projection displays
pages
855 - 861
Web of Science type
Article
Web of Science id
000283668800021
JCR category
ENGINEERING, ELECTRICAL & ELECTRONIC
JCR impact factor
0.857 (2010)
JCR rank
139/247 (2010)
JCR quartile
3 (2010)
ISSN
1071-0922
DOI
10.1889/JSID18.10.855
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
1054806
handle
http://hdl.handle.net/1854/LU-1054806
date created
2010-10-06 15:02:37
date last changed
2011-07-14 10:41:33
@article{1054806,
  abstract     = {A novel six-electrode SiGe micromirror pixel enabling analog pulse-width modulation (PWM) in display applications is presented. Instead of utilizing bitplanes, arbitrary duty cycles can be realized, resulting in an analog gray-level distribution. This eliminates the posterization (contouring) effect that is typical for digital micromirrors. Moreover, the pixel design does not require the incorporation of electronic comparators and the gamma compensation can be processed externally. Two out of the six electrodes are used as landing electrodes. The other four attracting electrodes are driven by two anti-phase saw-tooth signals and two fixed analog voltage signals. By applying this signal scheme, the duty cycle of the mirror is modulated in an analog manner. Test vehicles were manufactured where SiGe is the microelectromechanical systems (MEMS) material. The use of SiGe as a structural layer is advantageous to build MEMS since the CMOS and MEMS layers can be deposited in a monolithic manner. Measurements using a Laser Doppler Vibrometer (LDV) have confirmed the feasibility of analog PWM for 15-\ensuremath{\mu}m SiGe micromirrors.},
  author       = {Beernaert, Roel and Avci, Aykut and De Smet, Jelle and De Smet, Herbert and De Coster, Jeroen and Severi, Simone and Witvrouw, Ann},
  issn         = {1071-0922},
  journal      = {JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY},
  keyword      = {analog,pulse-width modulation,pixel,micromirror,SiGe,MEMS,Microelectromechanical systems,contouring,posterization},
  language     = {eng},
  number       = {10},
  pages        = {855--861},
  title        = {Novel analog pulse-width-modulated 15-\ensuremath{\mu}m SiGe micromirrors},
  url          = {http://dx.doi.org/10.1889/JSID18.10.855},
  volume       = {18},
  year         = {2010},
}

Chicago
Beernaert, Roel, Aykut Avci, Jelle De Smet, Herbert De Smet, Jeroen De Coster, Simone Severi, and Ann Witvrouw. 2010. “Novel Analog Pulse-width-modulated 15-μm SiGe Micromirrors.” Journal of the Society for Information Display 18 (10): 855–861.
APA
Beernaert, R., Avci, A., De Smet, J., De Smet, H., De Coster, J., Severi, S., & Witvrouw, A. (2010). Novel analog pulse-width-modulated 15-μm SiGe micromirrors. JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 18(10), 855–861.
Vancouver
1.
Beernaert R, Avci A, De Smet J, De Smet H, De Coster J, Severi S, et al. Novel analog pulse-width-modulated 15-μm SiGe micromirrors. JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY. 2010;18(10):855–61.
MLA
Beernaert, Roel, Aykut Avci, Jelle De Smet, et al. “Novel Analog Pulse-width-modulated 15-μm SiGe Micromirrors.” JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY 18.10 (2010): 855–861. Print.