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Mechanistic aspects of selective laser patterning of multilayered thin-film structures in OLED fabrication

Dimitris Karnakis, Geert Van Steenberge UGent, An Gielen, Johan De Baets UGent and Jeroen van den Brand (2010) Proceedings of LOPE-C 2010.
abstract
Selective laser patterning of OLEDs on flexible substrates represents a novel optical engineering challenge. Here we discuss the potential of ultrafast diode-pumped solid-state (DPSS) and UV excimer lasers for this application and demonstrate a stable process window for large area OLED patterning. We specifically studied the removal of transparent conductive layers on barrier layer and, metal electrodes on active OLED layer and report on laser damage thresholds, resulting feature quality and process speed limitations. Careful examination with optical profilometry and SEM reveals that the choice of laser wavelength and more importantly laser pulse duration is key for this applicaiton. A photomechanical stress-induced ablation mechanism is believed to be driving this process, resulting in debris-free, low temperature patterning with demonstrably no detrimental effects to the OLED performance.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Proceedings of LOPE-C 2010
pages
5 pages
publisher
Organic Electronics Association (OE-A)
place of publication
Frankfurt am Main, Germany
conference name
Large-area, Organic and Printed Electronics (LOPE-C) 2010
conference location
Frankfurt am Main, Germany
conference start
2010-05-31
conference end
2010-06-02
ISBN
9783000299551
language
English
UGent publication?
yes
classification
C1
copyright statement
I have transferred the copyright for this publication to the publisher
id
1047087
handle
http://hdl.handle.net/1854/LU-1047087
date created
2010-09-29 11:58:15
date last changed
2017-01-02 09:52:40
@inproceedings{1047087,
  abstract     = {Selective laser patterning of OLEDs on flexible substrates represents a novel optical engineering challenge.  Here we discuss the potential of ultrafast diode-pumped solid-state (DPSS) and UV excimer lasers for this application and demonstrate a stable process window for large area OLED patterning. We specifically studied the removal of transparent conductive layers on barrier layer and, metal electrodes on active OLED layer and report on laser damage thresholds, resulting feature quality and process speed limitations. Careful examination with optical profilometry and SEM reveals that the choice of laser wavelength and more importantly laser pulse duration is key for this applicaiton.  A photomechanical stress-induced ablation mechanism is believed to be driving this process, resulting in debris-free, low temperature patterning with demonstrably no detrimental effects to the OLED performance.},
  author       = {Karnakis, Dimitris and Van Steenberge, Geert and Gielen, An and De Baets, Johan and van den Brand, Jeroen},
  booktitle    = {Proceedings of LOPE-C 2010},
  isbn         = {9783000299551},
  language     = {eng},
  location     = {Frankfurt am Main, Germany},
  pages        = {5},
  publisher    = {Organic Electronics Association (OE-A)},
  title        = {Mechanistic aspects of selective laser patterning of multilayered thin-film structures in OLED fabrication},
  year         = {2010},
}

Chicago
Karnakis, Dimitris, Geert Van Steenberge, An Gielen, Johan De Baets, and Jeroen van den Brand. 2010. “Mechanistic Aspects of Selective Laser Patterning of Multilayered Thin-film Structures in OLED Fabrication.” In Proceedings of LOPE-C 2010. Frankfurt am Main, Germany: Organic Electronics Association (OE-A).
APA
Karnakis, D., Van Steenberge, G., Gielen, A., De Baets, J., & van den Brand, J. (2010). Mechanistic aspects of selective laser patterning of multilayered thin-film structures in OLED fabrication. Proceedings of LOPE-C 2010. Presented at the Large-area, Organic and Printed Electronics (LOPE-C) 2010, Frankfurt am Main, Germany: Organic Electronics Association (OE-A).
Vancouver
1.
Karnakis D, Van Steenberge G, Gielen A, De Baets J, van den Brand J. Mechanistic aspects of selective laser patterning of multilayered thin-film structures in OLED fabrication. Proceedings of LOPE-C 2010. Frankfurt am Main, Germany: Organic Electronics Association (OE-A); 2010.
MLA
Karnakis, Dimitris, Geert Van Steenberge, An Gielen, et al. “Mechanistic Aspects of Selective Laser Patterning of Multilayered Thin-film Structures in OLED Fabrication.” Proceedings of LOPE-C 2010. Frankfurt am Main, Germany: Organic Electronics Association (OE-A), 2010. Print.