Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices
- Author
- shankar kumar Selvaraja (UGent) , Wim Bogaerts (UGent) , Dries Van Thourhout (UGent) and Marc Schaekers (UGent)
- Organization
- Abstract
- Deposited silicon and, in particular, hydrogenated amorphous silicon forms an attractive alternative platform for realizing compact photonic integrated circuits. In this paper we report on trimming (toward lower wavelengths) and tuning (toward higher wavelengths) of photonic devices through a suitable thermal treatment. The former is achieved by a material density change, the latter through the thermo-optic effect. By using Fourier transform infrared spectroscopy, a change in the hydrogen content is identified as the source of the density change. A total wavelength tuning range of 24.6 nm is achievable, which can be used for compensating fabrication imperfections. c 2010 American Institute of Physics. [doi:10.1063/1.3479918]
- Keywords
- EVOLUTION, FILMS, photonic device trimming, silicon photonics, hydrogenated amorphous silicon, amorphous silicon
Downloads
-
L10-04213R-FIX-CORRECTION.pdf
- full text (Accepted manuscript)
- |
- open access
- |
- |
- 1.77 MB
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-1046387
- MLA
- Selvaraja, shankar kumar, et al. “Thermal Trimming and Tuning of Hydrogenated Amorphous Silicon Nano-Photonic Devices.” APPLIED PHYSICS LETTERS, vol. 97, no. 7, 2010, doi:10.1063/1.3479918.
- APA
- Selvaraja, shankar kumar, Bogaerts, W., Van Thourhout, D., & Schaekers, M. (2010). Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices. APPLIED PHYSICS LETTERS, 97(7). https://doi.org/10.1063/1.3479918
- Chicago author-date
- Selvaraja, shankar kumar, Wim Bogaerts, Dries Van Thourhout, and Marc Schaekers. 2010. “Thermal Trimming and Tuning of Hydrogenated Amorphous Silicon Nano-Photonic Devices.” APPLIED PHYSICS LETTERS 97 (7). https://doi.org/10.1063/1.3479918.
- Chicago author-date (all authors)
- Selvaraja, shankar kumar, Wim Bogaerts, Dries Van Thourhout, and Marc Schaekers. 2010. “Thermal Trimming and Tuning of Hydrogenated Amorphous Silicon Nano-Photonic Devices.” APPLIED PHYSICS LETTERS 97 (7). doi:10.1063/1.3479918.
- Vancouver
- 1.Selvaraja shankar kumar, Bogaerts W, Van Thourhout D, Schaekers M. Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices. APPLIED PHYSICS LETTERS. 2010;97(7).
- IEEE
- [1]shankar kumar Selvaraja, W. Bogaerts, D. Van Thourhout, and M. Schaekers, “Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices,” APPLIED PHYSICS LETTERS, vol. 97, no. 7, 2010.
@article{1046387,
abstract = {{Deposited silicon and, in particular, hydrogenated amorphous silicon forms an attractive alternative platform for realizing compact photonic integrated circuits. In this paper we report on trimming (toward lower wavelengths) and tuning (toward higher wavelengths) of photonic devices through a suitable thermal treatment. The former is achieved by a material density change, the latter through the thermo-optic effect. By using Fourier transform infrared spectroscopy, a change in the hydrogen content is identified as the source of the density change. A total wavelength tuning range of 24.6 nm is achievable, which can be used for compensating fabrication imperfections. c 2010 American Institute of Physics. [doi:10.1063/1.3479918]}},
articleno = {{071120}},
author = {{Selvaraja, shankar kumar and Bogaerts, Wim and Van Thourhout, Dries and Schaekers, Marc}},
issn = {{0003-6951}},
journal = {{APPLIED PHYSICS LETTERS}},
keywords = {{EVOLUTION,FILMS,photonic device trimming,silicon photonics,hydrogenated amorphous silicon,amorphous silicon}},
language = {{eng}},
number = {{7}},
pages = {{3}},
title = {{Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices}},
url = {{http://dx.doi.org/10.1063/1.3479918}},
volume = {{97}},
year = {{2010}},
}
- Altmetric
- View in Altmetric
- Web of Science
- Times cited: