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Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices

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Keywords
EVOLUTION, FILMS, photonic device trimming, silicon photonics, hydrogenated amorphous silicon, amorphous silicon

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Citation

Please use this url to cite or link to this publication:

Chicago
Selvaraja, shankar kumar, Wim Bogaerts, Dries Van Thourhout, and Marc Schaekers. 2010. “Thermal Trimming and Tuning of Hydrogenated Amorphous Silicon Nano-photonic Devices.” Applied Physics Letters 97 (7).
APA
Selvaraja, shankar kumar, Bogaerts, W., Van Thourhout, D., & Schaekers, M. (2010). Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices. APPLIED PHYSICS LETTERS, 97(7).
Vancouver
1.
Selvaraja shankar kumar, Bogaerts W, Van Thourhout D, Schaekers M. Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices. APPLIED PHYSICS LETTERS. 2010;97(7).
MLA
Selvaraja, shankar kumar, Wim Bogaerts, Dries Van Thourhout, et al. “Thermal Trimming and Tuning of Hydrogenated Amorphous Silicon Nano-photonic Devices.” APPLIED PHYSICS LETTERS 97.7 (2010): n. pag. Print.
@article{1046387,
  articleno    = {071120},
  author       = {Selvaraja, shankar kumar and Bogaerts, Wim and Van Thourhout, Dries and Schaekers, Marc },
  issn         = {0003-6951},
  journal      = {APPLIED PHYSICS LETTERS},
  keyword      = {EVOLUTION,FILMS,photonic device trimming,silicon photonics,hydrogenated amorphous silicon,amorphous silicon},
  language     = {eng},
  number       = {7},
  pages        = {3},
  title        = {Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices},
  url          = {http://dx.doi.org/10.1063/1.3479918},
  volume       = {97},
  year         = {2010},
}

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