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Qualitative model of the magnetron discharge

Jan Musschoot (UGent) and Johan Haemers (UGent)
(2010) VACUUM. 84(4). p.488-493
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Keywords
dc, Magnetron, Model, Sputter, Discharge, Current, Voltage, Pressure, Sheath, Ionization, Plasma, SPUTTER-DEPOSITION, CARLO-SIMULATION, TARGET EROSION, PLASMA, TRANSPORT, SYSTEM, ARGON

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Citation

Please use this url to cite or link to this publication:

Chicago
Musschoot, Jan, and Johan Haemers. 2010. “Qualitative Model of the Magnetron Discharge.” Vacuum 84 (4): 488–493.
APA
Musschoot, J., & Haemers, J. (2010). Qualitative model of the magnetron discharge. VACUUM, 84(4), 488–493.
Vancouver
1.
Musschoot J, Haemers J. Qualitative model of the magnetron discharge. VACUUM. 2010;84(4):488–93.
MLA
Musschoot, Jan, and Johan Haemers. “Qualitative Model of the Magnetron Discharge.” VACUUM 84.4 (2010): 488–493. Print.
@article{1007812,
  author       = {Musschoot, Jan and Haemers, Johan},
  issn         = {0042-207X},
  journal      = {VACUUM},
  language     = {eng},
  number       = {4},
  pages        = {488--493},
  title        = {Qualitative model of the magnetron discharge},
  url          = {http://dx.doi.org/10.1016/j.vacuum.2009.10.011},
  volume       = {84},
  year         = {2010},
}

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