Experimental demonstration of the high alignment-tolerant behavior of a mid-infrared waveguide platform for evanescent field sensing
- Author
- Felix Frank, Mattias Verstuyft (UGent) , Nuria Teigell Beneitez (UGent) , Jeroen Missinne (UGent) , Günther Roelkens (UGent) , Dries Van Thourhout (UGent) and Bernhard Lendl
- Organization
- Abstract
- Alignment tolerant coupling interfaces are an important feat for mid-IR waveguides when moving closer to real-world sensing applications, as they allow for an easy and fast replacement of waveguides. In this work, we demonstrate the alignment tolerant behavior of a germanium-on-silicon trenched waveguide platform with monolithically integrated microlenses using backside coupling of an expanded beam for evanescent field sensing between 6.5 and 7.5 μm. The chip with a propagation loss of approximately 5 dB/cm was mounted and aligned, using active alignment, in a sample holder that could be moved in all three dimensions to induce misalignments with a precision of the manual actuator of 1.3 μm. Using this setup, the in-plane 1 dB alignment tolerances were measured to be ±16 μm, while the 1 dB alignment tolerances in the longitudinal direction were found to be larger than ±150 μm. Without the addition of the microlenses, we expect an in-plane 1 dB alignment tolerance of ±3 μm based on simulations. Additionally, it could be demonstrated that the integration of the microlenses significantly improves the stability of the broadband grating couplers in regard to misalignment-induced intensity changes in the obtained transmission spectra.
- Keywords
- mid-infrared, waveguide, photonic integrated circuit, silicon photonics, alignment tolerances, PHOTONIC INTEGRATED-CIRCUITS, SILICON, GE, FILMS, CHIP
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-01JBY0NY2FJHBQAB1933MW011R
- MLA
- Frank, Felix, et al. “Experimental Demonstration of the High Alignment-Tolerant Behavior of a Mid-Infrared Waveguide Platform for Evanescent Field Sensing.” ACS APPLIED OPTICAL MATERIALS, vol. 2, no. 9, 2024, pp. 1926–32, doi:10.1021/acsaom.4c00280.
- APA
- Frank, F., Verstuyft, M., Teigell Beneitez, N., Missinne, J., Roelkens, G., Van Thourhout, D., & Lendl, B. (2024). Experimental demonstration of the high alignment-tolerant behavior of a mid-infrared waveguide platform for evanescent field sensing. ACS APPLIED OPTICAL MATERIALS, 2(9), 1926–1932. https://doi.org/10.1021/acsaom.4c00280
- Chicago author-date
- Frank, Felix, Mattias Verstuyft, Nuria Teigell Beneitez, Jeroen Missinne, Günther Roelkens, Dries Van Thourhout, and Bernhard Lendl. 2024. “Experimental Demonstration of the High Alignment-Tolerant Behavior of a Mid-Infrared Waveguide Platform for Evanescent Field Sensing.” ACS APPLIED OPTICAL MATERIALS 2 (9): 1926–32. https://doi.org/10.1021/acsaom.4c00280.
- Chicago author-date (all authors)
- Frank, Felix, Mattias Verstuyft, Nuria Teigell Beneitez, Jeroen Missinne, Günther Roelkens, Dries Van Thourhout, and Bernhard Lendl. 2024. “Experimental Demonstration of the High Alignment-Tolerant Behavior of a Mid-Infrared Waveguide Platform for Evanescent Field Sensing.” ACS APPLIED OPTICAL MATERIALS 2 (9): 1926–1932. doi:10.1021/acsaom.4c00280.
- Vancouver
- 1.Frank F, Verstuyft M, Teigell Beneitez N, Missinne J, Roelkens G, Van Thourhout D, et al. Experimental demonstration of the high alignment-tolerant behavior of a mid-infrared waveguide platform for evanescent field sensing. ACS APPLIED OPTICAL MATERIALS. 2024;2(9):1926–32.
- IEEE
- [1]F. Frank et al., “Experimental demonstration of the high alignment-tolerant behavior of a mid-infrared waveguide platform for evanescent field sensing,” ACS APPLIED OPTICAL MATERIALS, vol. 2, no. 9, pp. 1926–1932, 2024.
@article{01JBY0NY2FJHBQAB1933MW011R,
abstract = {{Alignment tolerant coupling interfaces are an important feat for mid-IR waveguides when moving closer to real-world sensing applications, as they allow for an easy and fast replacement of waveguides. In this work, we demonstrate the alignment tolerant behavior of a germanium-on-silicon trenched waveguide platform with monolithically integrated microlenses using backside coupling of an expanded beam for evanescent field sensing between 6.5 and 7.5 μm. The chip with a propagation loss of approximately 5 dB/cm was mounted and aligned, using active alignment, in a sample holder that could be moved in all three dimensions to induce misalignments with a precision of the manual actuator of 1.3 μm. Using this setup, the in-plane 1 dB alignment tolerances were measured to be ±16 μm, while the 1 dB alignment tolerances in the longitudinal direction were found to be larger than ±150 μm. Without the addition of the microlenses, we expect an in-plane 1 dB alignment tolerance of ±3 μm based on simulations. Additionally, it could be demonstrated that the integration of the microlenses significantly improves the stability of the broadband grating couplers in regard to misalignment-induced intensity changes in the obtained transmission spectra.}},
author = {{Frank, Felix and Verstuyft, Mattias and Teigell Beneitez, Nuria and Missinne, Jeroen and Roelkens, Günther and Van Thourhout, Dries and Lendl, Bernhard}},
issn = {{2771-9855}},
journal = {{ACS APPLIED OPTICAL MATERIALS}},
keywords = {{mid-infrared,waveguide,photonic integrated circuit,silicon photonics,alignment tolerances,PHOTONIC INTEGRATED-CIRCUITS,SILICON,GE,FILMS,CHIP}},
language = {{eng}},
number = {{9}},
pages = {{1926--1932}},
title = {{Experimental demonstration of the high alignment-tolerant behavior of a mid-infrared waveguide platform for evanescent field sensing}},
url = {{http://doi.org/10.1021/acsaom.4c00280}},
volume = {{2}},
year = {{2024}},
}
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