Comparison of thermo-optic phase shifters in imec’s silicon photonics platform
- Author
- Yuxi Fang, Hong Deng (UGent) , Xiangfeng Chen (UGent) , Halil Cuma, Nagarjun Katta Pradeep Kumar (UGent) , Filippo Ferraro, Guy Lepage, Peter DE Heyn and Wim Bogaerts (UGent)
- Organization
- Project
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- PhotonICSWARM (Photonic Integrated Circuits using Scattered Waveguide elements in an Adaptive, Reconfigurable Mesh)
- Abstract
- Taking advantage of the high thermo-optic coefficient of silicon is an effective way to realize optical phase shifting in silicon photonic circuits. Based on the imec iSiPP200 silicon photonics platform, different types of integrated silicon photonic phase shifters are compared, including doped-silicon side heaters, diode-loaded heaters, doped waveguides, and metal top heaters. The effect of thermal insulation on phase shifter efficiency and bandwidth is discussed for different architectures with and without substrate undercut. By locally removing the silicon substrate underneath the heater, the efficiency of doped-silicon side heaters is improved by a factor of 2.7 for a π phase shift.
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-01J3J0GHGNPKX1KHGQKP4MYKNR
- MLA
- Fang, Yuxi, et al. “Comparison of Thermo-Optic Phase Shifters in Imec’s Silicon Photonics Platform.” The 25th European Conference on Integrated Optics : Proceedings of ECIO 2024, edited by Jeremy Witzens et al., vol. 402, Springer, 2024, pp. 337–42, doi:10.1007/978-3-031-63378-2_55.
- APA
- Fang, Y., Deng, H., Chen, X., Cuma, H., Katta Pradeep Kumar, N., Ferraro, F., … Bogaerts, W. (2024). Comparison of thermo-optic phase shifters in imec’s silicon photonics platform. In J. Witzens, J. Poon, L. Zimmermann, & W. Freude (Eds.), The 25th European Conference on Integrated Optics : proceedings of ECIO 2024 (Vol. 402, pp. 337–342). https://doi.org/10.1007/978-3-031-63378-2_55
- Chicago author-date
- Fang, Yuxi, Hong Deng, Xiangfeng Chen, Halil Cuma, Nagarjun Katta Pradeep Kumar, Filippo Ferraro, Guy Lepage, Peter DE Heyn, and Wim Bogaerts. 2024. “Comparison of Thermo-Optic Phase Shifters in Imec’s Silicon Photonics Platform.” In The 25th European Conference on Integrated Optics : Proceedings of ECIO 2024, edited by Jeremy Witzens, Joyce Poon, Lars Zimmermann, and Wolfgang Freude, 402:337–42. Springer. https://doi.org/10.1007/978-3-031-63378-2_55.
- Chicago author-date (all authors)
- Fang, Yuxi, Hong Deng, Xiangfeng Chen, Halil Cuma, Nagarjun Katta Pradeep Kumar, Filippo Ferraro, Guy Lepage, Peter DE Heyn, and Wim Bogaerts. 2024. “Comparison of Thermo-Optic Phase Shifters in Imec’s Silicon Photonics Platform.” In The 25th European Conference on Integrated Optics : Proceedings of ECIO 2024, ed by. Jeremy Witzens, Joyce Poon, Lars Zimmermann, and Wolfgang Freude, 402:337–342. Springer. doi:10.1007/978-3-031-63378-2_55.
- Vancouver
- 1.Fang Y, Deng H, Chen X, Cuma H, Katta Pradeep Kumar N, Ferraro F, et al. Comparison of thermo-optic phase shifters in imec’s silicon photonics platform. In: Witzens J, Poon J, Zimmermann L, Freude W, editors. The 25th European Conference on Integrated Optics : proceedings of ECIO 2024. Springer; 2024. p. 337–42.
- IEEE
- [1]Y. Fang et al., “Comparison of thermo-optic phase shifters in imec’s silicon photonics platform,” in The 25th European Conference on Integrated Optics : proceedings of ECIO 2024, Aachen, Germany, 2024, vol. 402, pp. 337–342.
@inproceedings{01J3J0GHGNPKX1KHGQKP4MYKNR,
abstract = {{Taking advantage of the high thermo-optic coefficient of silicon is an effective way to realize optical phase shifting in silicon photonic circuits. Based on the imec iSiPP200 silicon photonics platform, different types of integrated silicon photonic phase shifters are compared, including doped-silicon side heaters, diode-loaded heaters, doped waveguides, and metal top heaters. The effect of thermal insulation on phase shifter efficiency and bandwidth is discussed for different architectures with and without substrate undercut. By locally removing the silicon substrate underneath the heater, the efficiency of doped-silicon side heaters is improved by a factor of 2.7 for a π phase shift.}},
author = {{Fang, Yuxi and Deng, Hong and Chen, Xiangfeng and Cuma, Halil and Katta Pradeep Kumar, Nagarjun and Ferraro, Filippo and Lepage, Guy and DE Heyn, Peter and Bogaerts, Wim}},
booktitle = {{The 25th European Conference on Integrated Optics : proceedings of ECIO 2024}},
editor = {{Witzens, Jeremy and Poon, Joyce and Zimmermann, Lars and Freude, Wolfgang}},
isbn = {{9783031633775}},
language = {{eng}},
location = {{Aachen, Germany}},
pages = {{337--342}},
publisher = {{Springer}},
title = {{Comparison of thermo-optic phase shifters in imec’s silicon photonics platform}},
url = {{http://doi.org/10.1007/978-3-031-63378-2_55}},
volume = {{402}},
year = {{2024}},
}
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