PZT micro-transfer printing for photonic MEMS
- Author
- Irfan Ansari (UGent) , Kobe De Geest (UGent) , Jasper De Witte (UGent) , Tom Vandekerckhove (UGent) , Hannes Rijckaert (UGent) , Ewout Picavet (UGent) , Enes Lievens (UGent) , Gilles Freddy Feutmba (UGent) , Tessa Van de Veire (UGent) , Bart Kuyken (UGent) , Jeroen Beeckman (UGent) and Dries Van Thourhout (UGent)
- Organization
- Abstract
- This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications.
- Keywords
- SILICON, PZT, MEMS, PIC, Piezoelectric, Si photonics
Downloads
-
(...).pdf
- full text (Published version)
- |
- UGent only
- |
- |
- 1.35 MB
-
pub 2970acc.pdf
- full text (Accepted manuscript)
- |
- open access
- |
- |
- 566.17 KB
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-01HRETB0V17K8MT2V0V44290RD
- MLA
- Ansari, Irfan, et al. “PZT Micro-Transfer Printing for Photonic MEMS.” 2023 IEEE PHOTONICS CONFERENCE, IPC, IEEE, 2023, doi:10.1109/IPC57732.2023.10360713.
- APA
- Ansari, I., De Geest, K., De Witte, J., Vandekerckhove, T., Rijckaert, H., Picavet, E., … Van Thourhout, D. (2023). PZT micro-transfer printing for photonic MEMS. 2023 IEEE PHOTONICS CONFERENCE, IPC. Presented at the Annual Conference of the IEEE-Photonics-Society (IPC), Orlando, FL. https://doi.org/10.1109/IPC57732.2023.10360713
- Chicago author-date
- Ansari, Irfan, Kobe De Geest, Jasper De Witte, Tom Vandekerckhove, Hannes Rijckaert, Ewout Picavet, Enes Lievens, et al. 2023. “PZT Micro-Transfer Printing for Photonic MEMS.” In 2023 IEEE PHOTONICS CONFERENCE, IPC. IEEE. https://doi.org/10.1109/IPC57732.2023.10360713.
- Chicago author-date (all authors)
- Ansari, Irfan, Kobe De Geest, Jasper De Witte, Tom Vandekerckhove, Hannes Rijckaert, Ewout Picavet, Enes Lievens, Gilles Freddy Feutmba, Tessa Van de Veire, Bart Kuyken, Jeroen Beeckman, and Dries Van Thourhout. 2023. “PZT Micro-Transfer Printing for Photonic MEMS.” In 2023 IEEE PHOTONICS CONFERENCE, IPC. IEEE. doi:10.1109/IPC57732.2023.10360713.
- Vancouver
- 1.Ansari I, De Geest K, De Witte J, Vandekerckhove T, Rijckaert H, Picavet E, et al. PZT micro-transfer printing for photonic MEMS. In: 2023 IEEE PHOTONICS CONFERENCE, IPC. IEEE; 2023.
- IEEE
- [1]I. Ansari et al., “PZT micro-transfer printing for photonic MEMS,” in 2023 IEEE PHOTONICS CONFERENCE, IPC, Orlando, FL, 2023.
@inproceedings{01HRETB0V17K8MT2V0V44290RD,
abstract = {{This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications.}},
author = {{Ansari, Irfan and De Geest, Kobe and De Witte, Jasper and Vandekerckhove, Tom and Rijckaert, Hannes and Picavet, Ewout and Lievens, Enes and Feutmba, Gilles Freddy and Van de Veire, Tessa and Kuyken, Bart and Beeckman, Jeroen and Van Thourhout, Dries}},
booktitle = {{2023 IEEE PHOTONICS CONFERENCE, IPC}},
isbn = {{9798350347227}},
issn = {{2374-0140}},
keywords = {{SILICON,PZT,MEMS,PIC,Piezoelectric,Si photonics}},
language = {{eng}},
location = {{Orlando, FL}},
pages = {{2}},
publisher = {{IEEE}},
title = {{PZT micro-transfer printing for photonic MEMS}},
url = {{http://doi.org/10.1109/IPC57732.2023.10360713}},
year = {{2023}},
}
- Altmetric
- View in Altmetric
- Web of Science
- Times cited: