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Nanoporous silica-alumina films fabricated on silicon photonic chips for selective ammonia sensing

Yanlu Li (UGent) , Claudio Bellani, Nebiyu Adello Yebo (UGent) , Jolien Dendooven (UGent) , Jin Won Seo, Christophe Detavernier (UGent) , Roel Baets (UGent) , Johan A. Martens and Sreeprasanth Pulinthanathu Sree
(2022) ACS APPLIED NANO MATERIALS. 5(11). p.16126-16135
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Abstract
Surface-modified nanoporous silica films offer attractive features for analyte-specific gas detection applications. Here we demonstrate the integration of highly porous silica-alumina films on silicon nanophotonic chips and their performance in selective NH3 detection. Prototype sensors with microporous as well as mesoporous silica films were assembled. The incorporation of aluminum in trace amount needed to generate acid sites was achieved during film deposition or using postsynthesis atomic layer deposition. Silicon photonic micro-ring resonators functionalized with both techniques demonstrated a selective response to NH3 relative to CO2. Furthermore, the response was rapid and reversible. The role of preadsorbed water vapor on the reversible nature of the sensor is also investigated. Experimental observations indicate that water vapor preadsorbed on the films leads to fast sensor recovery while maintaining selectivity toward NH3. This could be attributed to the relatively less strong and still selective binding of NH3 on protonated water molecules preadsorbed on the surface acid sites. The potential of modified nanoporous films for portable and low-cost NH3 sensing on optical chips demonstrated here can be exploited in health care as well as industrial applications.
Keywords
General Materials Science, nanoporous silica films, micro-ring resonators, atomic layer deposition, selective gas sensing, ammonia detection, THIN-FILMS, GAS-DETECTION, SENSORS, COMPOSITES, ABSORPTION, RESONATOR, LAYER

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Citation

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MLA
Li, Yanlu, et al. “Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia Sensing.” ACS APPLIED NANO MATERIALS, vol. 5, no. 11, 2022, pp. 16126–35, doi:10.1021/acsanm.2c02741.
APA
Li, Y., Bellani, C., Yebo, N. A., Dendooven, J., Seo, J. W., Detavernier, C., … Pulinthanathu Sree, S. (2022). Nanoporous silica-alumina films fabricated on silicon photonic chips for selective ammonia sensing. ACS APPLIED NANO MATERIALS, 5(11), 16126–16135. https://doi.org/10.1021/acsanm.2c02741
Chicago author-date
Li, Yanlu, Claudio Bellani, Nebiyu Adello Yebo, Jolien Dendooven, Jin Won Seo, Christophe Detavernier, Roel Baets, Johan A. Martens, and Sreeprasanth Pulinthanathu Sree. 2022. “Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia Sensing.” ACS APPLIED NANO MATERIALS 5 (11): 16126–35. https://doi.org/10.1021/acsanm.2c02741.
Chicago author-date (all authors)
Li, Yanlu, Claudio Bellani, Nebiyu Adello Yebo, Jolien Dendooven, Jin Won Seo, Christophe Detavernier, Roel Baets, Johan A. Martens, and Sreeprasanth Pulinthanathu Sree. 2022. “Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia Sensing.” ACS APPLIED NANO MATERIALS 5 (11): 16126–16135. doi:10.1021/acsanm.2c02741.
Vancouver
1.
Li Y, Bellani C, Yebo NA, Dendooven J, Seo JW, Detavernier C, et al. Nanoporous silica-alumina films fabricated on silicon photonic chips for selective ammonia sensing. ACS APPLIED NANO MATERIALS. 2022;5(11):16126–35.
IEEE
[1]
Y. Li et al., “Nanoporous silica-alumina films fabricated on silicon photonic chips for selective ammonia sensing,” ACS APPLIED NANO MATERIALS, vol. 5, no. 11, pp. 16126–16135, 2022.
@article{01GKNYRCYN52K47HWCEG8X0ZJG,
  abstract     = {{Surface-modified nanoporous silica films offer attractive features for analyte-specific gas detection applications. Here we demonstrate the integration of highly porous silica-alumina films on silicon nanophotonic chips and their performance in selective NH3 detection. Prototype sensors with microporous as well as mesoporous silica films were assembled. The incorporation of aluminum in trace amount needed to generate acid sites was achieved during film deposition or using postsynthesis atomic layer deposition. Silicon photonic micro-ring resonators functionalized with both techniques demonstrated a selective response to NH3 relative to CO2. Furthermore, the response was rapid and reversible. The role of preadsorbed water vapor on the reversible nature of the sensor is also investigated. Experimental observations indicate that water vapor preadsorbed on the films leads to fast sensor recovery while maintaining selectivity toward NH3. This could be attributed to the relatively less strong and still selective binding of NH3 on protonated water molecules preadsorbed on the surface acid sites. The potential of modified nanoporous films for portable and low-cost NH3 sensing on optical chips demonstrated here can be exploited in health care as well as industrial applications.}},
  author       = {{Li, Yanlu and Bellani, Claudio and Yebo, Nebiyu Adello and Dendooven, Jolien and Seo, Jin Won and Detavernier, Christophe and Baets, Roel and Martens, Johan A. and Pulinthanathu Sree, Sreeprasanth}},
  issn         = {{2574-0970}},
  journal      = {{ACS APPLIED NANO MATERIALS}},
  keywords     = {{General Materials Science,nanoporous silica films,micro-ring resonators,atomic layer deposition,selective gas sensing,ammonia detection,THIN-FILMS,GAS-DETECTION,SENSORS,COMPOSITES,ABSORPTION,RESONATOR,LAYER}},
  language     = {{eng}},
  number       = {{11}},
  pages        = {{16126--16135}},
  title        = {{Nanoporous silica-alumina films fabricated on silicon photonic chips for selective ammonia sensing}},
  url          = {{http://doi.org/10.1021/acsanm.2c02741}},
  volume       = {{5}},
  year         = {{2022}},
}
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