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Project: An in-situ study of Molecular Layer Deposition of metalcone films and

01/10/12 – 30/09/16

The growth mechanism, conformality and transformation into nanoporous films of metalcone films will be studied using several in-­‐situ characterization techniques. Central topics for this research are the bonding of the organic precursor ,with the surface, the conformality on high aspect ratio structures and the porosity of the transformed metalcone layers.