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Role of the oxidizing co-reactant in Pt growth by atomic layer deposition using MeCpPtMe3 and O2/O3/O2-plasma
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- Journal Article
- A1
- open access
A step toward correct interpretation of XPS results in metal oxides : a case study aided by first-principles method in ZnO
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- Journal Article
- A1
- open access
Atomic layer deposition of yttrium oxide as a protective coating for lithium metal anodes
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Depositing ALD-oxides on MLD-metalcones : enhancing initial growth through O2 plasma densification
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- Journal Article
- A1
- open access
Depositing ALD-oxides on MLD-metalcones : enhancing initial growth through O2 plasma densification
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- Conference Paper
- C3
- open access
Strategies to produce boron-containing ALD thin films using trimethyl borate precursor : from thermal to plasma to combined-plasma approach
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Depositing ALD-oxides on MLD-metalcones : enhancing initial growth through O2 plasma densification
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- Conference Paper
- C3
- open access
Titanium carboxylate molecular layer deposited hybrid films as protective coatings for lithium-ion batteries
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- Conference Paper
- C3
- open access
Atomic layer deposition on polymer thin films : on the role of precursor infiltration and reactivity
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- Conference Paper
- C3
- open access
Thickness matters : sintering inhibition in Pt nanoparticle catalysts via step-by-step control of MgO overcoats