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Sputter deposition of MgxAlyOz thin films in a dual-magnetron device: a multi-species Monte Carlo model
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- Conference Paper
- C3
- open access
The route to heaven for sputter deposited AZO
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- Journal Article
- A1
- open access
Texture and microstructure in co-sputtered Mg-M-O (M = Mg, Al, Cr, Ti, Zr, and Y) films
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- Journal Article
- A1
- open access
Composition-crystallinity-property relations in Mg-M-O films
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- PhD Thesis
- open access
Sputter deposition of MgO thin films: the effect of cation substitution
(2012) -
Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)
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The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg-Y-O thin films
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Fundamental aspects of mixed oxide thin film growth
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Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model
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Compositional effects on the growth of Mg(M)O films