Stijn Mahieu

Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Grégory Abadias, Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2013) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 46(5).

Miscellaneous

Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)

Marta Martins Saraiva (UGent) , Violeta Georgieva, Stijn Mahieu (UGent) , Koen Van Aeken (UGent) , Annemie Bogaerts and Diederik Depla (UGent)

(2011) JOURNAL OF APPLIED PHYSICS. 110(12).

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Fundamental aspects of mixed oxide thin film growth

Marta Martins Saraiva (UGent) , V Georgieva, N Jehanathan, Stijn Mahieu (UGent) , Wouter Leroy (UGent) , R Persoons, G Van Tendeloo, A Bogaerts and Diederik Depla (UGent)

(2011) ICMCTF 2011 : 38th ICMCTF : program, technical sessions, abstracts, exibition. p.119-120

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Rotatable magnetron sputtering: downscaling for better understanding

Roger De Gryse (UGent) , Diederik Depla (UGent) , Stijn Mahieu (UGent) and Johan Haemers (UGent)

(2011) MATERIALS TECHNOLOGY. 26(1). p.3-9

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Conference Paper
C3
open access

Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2011) E-MRS Spring Meeting, Abstracts.

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Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Stijn Mahieu (UGent) , Wouter Leroy (UGent) , Koen Van Aeken (UGent) , M Wolter, J Colaux, S Lucas, G Abadias, Paul Matthys (UGent) and Diederik Depla (UGent)

(2011) SOLAR ENERGY. 85(3). p.538-544

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Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere

Wouter Leroy (UGent) , Stephanos Konstantinidis, Stijn Mahieu (UGent) , Rony Snyders and Diederik Depla (UGent)

(2011) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 44(11).

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In search for the limits of rotating cylindrical magnetron sputtering

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Roger De Gryse (UGent) and Diederik Depla (UGent)

(2010) Magnetron, Ion processing and Arc Technologies European conference, Abstracts.

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Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2010) Twelfth international conference on plasma surface engineering : abstracts. p.521-521

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Book Chapter
open access

Sputter deposition processes

Diederik Depla (UGent) , Stijn Mahieu (UGent) and Joseph Greene

(2010) Handbook of deposition technologies for films and coatings : science, applications and technology. p.253-296

Academic Bibliography

Stijn Mahieu

Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)

Fundamental aspects of mixed oxide thin film growth

Rotatable magnetron sputtering: downscaling for better understanding

Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere

In search for the limits of rotating cylindrical magnetron sputtering

Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides

Sputter deposition processes

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