dr. Davy Deduytsche
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Single-event microkinetic model based design of tailored zeolite catalysts through atomic layer deposition
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Texture of atomic layer deposited ruthenium
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Conformality of Al2O3 and AlN deposited by plasma-enhanced atomic layer deposition
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In situ X-ray diffraction study of thin film Ir/Si solid state reactions
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- Conference Paper
- C3
- open access
Modeling the conformality of atomic layer deposition: the effect of sticking probability
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Ru thin film grown on TaN by plasma enhanced atomic layer deposition
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Comparison of thermal and plasma enhanced ALD/CVD of vanadium pentoxide
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Modeling the conformality of atomic layer deposition: the effect of sticking probability
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Atomic layer deposition of titanium nitride from TDMAT precursor
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- Conference Paper
- C3
- open access
Conformality of thermal and plasma enhanced ALD