- ORCID iD
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0000-0001-6606-2480
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- Journal Article
- A1
- open access
Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films
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Convergence during feedback controlled reactive magnetron sputtering : mechanisms and classification
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- Journal Article
- A1
- open access
A python-based approach to sputter deposition simulations in combinatorial materials science
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Industrial reactive sputter deposition of TiZrN coatings : the role of nitrogen partial pressure
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- Journal Article
- A1
- open access
PM2.5 and PM10 adsorption onto filters and surfaces functionalized with calcium carbonate particle assembly
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- Journal Article
- A1
- open access
Phase composition of sputter deposited tungsten thin films
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- Journal Article
- A1
- open access
Floating potential probes for process control during reactive magnetron sputtering
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- Journal Article
- A1
- open access
Note on the low deposition rate during reactive magnetron sputtering
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- Journal Article
- A1
- open access
Calculation of oxide sputter yields
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- Journal Article
- A1
- open access
The measurement and impact of negative oxygen ions during reactive sputter deposition