Academic Bibliography

Search 200 years of publications by Ghent University researchers.

ereprof. dr. ir. Roland Vanmeirhaeghe

Show Sort by

Add to list
- Conference Paper
- C3
- open access
Modeling the conformality of atomic layer deposition: the effect of sticking probability

Jolien Dendooven (UGent) , Jan Musschoot (UGent) , Davy Deduytsche (UGent) , Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent)

(2009) Atomic Layer Deposition, 9th Baltic conference.
Add to list
Ru thin film grown on TaN by plasma enhanced atomic layer deposition

Qi Xie (UGent) , YL Jiang, Jan Musschoot (UGent) , Davy Deduytsche (UGent) , Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , S Van den Berghe, GP Ru, BZ Li and XP Qu

(2009) THIN SOLID FILMS. 517(16). p.4689-4693
Add to list
- Journal Article
- A1
In situ x-ray diffraction study of metal induced crystallization of amorphous germanium

Werner Knaepen (UGent) , S Gaudet, Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , J Sweet and C Lavoie

(2009) JOURNAL OF APPLIED PHYSICS. 105(8).
Add to list
- Journal Article
- A1
In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers

Charlotte Van Bockstael, Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , Jean Jordan-Sweet and Christian Lavoie

(2009) Journal of Applied Physics. 106(6). p.064515-1-064515-
Add to list
Comparison of thermal and plasma enhanced ALD/CVD of vanadium pentoxide

Jan Musschoot (UGent) , Davy Deduytsche (UGent) , Hilde Poelman (UGent) , Johan Haemers (UGent) , Roland Vanmeirhaeghe (UGent) , Sven Van den Berghe and Christophe Detavernier (UGent)

(2009) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 156(7). p.P122-P126
Add to list
- Conference Paper
- P1
- open access
The texture of thin NiSi films and its effect on agglomeration

Koen De Keyser (UGent) , Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , Jean Jordan-Sweet and Christian Lavoie

(2009) CERAMIC TRANSACTIONS. 201. p.3-10
Add to list
Modeling the conformality of atomic layer deposition: the effect of sticking probability

Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Jan Musschoot (UGent) , Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent)

(2009) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 156(4). p.P63-P67
Add to list
- Conference Paper
- C3
- open access
Conformality of thermal and plasma enhanced ALD

Jolien Dendooven (UGent) , Jan Musschoot (UGent) , Davy Deduytsche (UGent) , Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent)

(2008) Atomic Layer Deposition, 8th International conference, Abstracts.
Add to list
- Conference Paper
- P1
Physical and optical properties of ZnO thin films grown by DC sputtering deposition

T Chen, SY Liu, Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) and XP Qu

(2008) 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4. p.742-745
Add to list
Formation and stability of NiSi in the presence of Co and Fe alloying elements

Davy Deduytsche (UGent) , Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , Jean Jordan-Sweet and Christian Lavoie

(2008) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 26(6). p.1971-1977

← Previous

1
2
3
4
5
…
19

Next →