ereprof. dr. Johan Haemers
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Thirty years of rotatable magnetrons
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Rotatable magnetron sputtering: downscaling for better understanding
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Rotating cylindrical magnetron sputtering: simulation of the reactive process
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Texture of atomic layer deposited ruthenium
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Qualitative model of the magnetron discharge
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Influence of the magnetic field configuration on the reactive sputter deposition of TiN
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Comparison of thermal and plasma enhanced ALD/CVD of vanadium pentoxide
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Some more equations describing reactive magnetron sputtering
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Observation of hysteresis in a non-reactive magnetron discharge
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Investigation of the sustaining mechanisms of dc magnetron discharges and consequences for I-V characteristics