ereprof. dr. Johan Haemers

Conference Paper
C3
open access

Plasma-enhanced ALD on particles and powders

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Plasma Surface Engineering, 15th International conference, Abstracts.

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Conference Paper
C3
open access

Thermal and plasma enhanced atomic layer deposition on powders and particles

Geert Rampelberg (UGent) , Véronique Cremers (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Belgian Physical Society, General scientific meeting, Abstracts.

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Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Philippe Smet (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2014) ACS APPLIED MATERIALS & INTERFACES. 6(10). p.7316-7324

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Conference Paper
C3
open access

Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2014) Advanced Ceramics and Composites, 38th International conference, Abstracts.

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Influencing the hysteresis during reactive magnetron sputtering by gas separation

Diederik Depla (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)

(2013) SURFACE & COATINGS TECHNOLOGY. 235. p.62-67

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Conference Paper
C3
open access

Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2013) Atomic Layer Deposition, 13th International conference, Abstract book.

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Conference Paper
C1
open access

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2013) Partec 2013, Proceedings.

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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2012) SURFACE & COATINGS TECHNOLOGY. 213. p.183-191

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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Jan Musschoot, Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , G Buyle and Christophe Detavernier (UGent)

(2012) SURFACE & COATINGS TECHNOLOGY. 206(22). p.4511-4517

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Conference Paper
C3
open access

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Kilian Devloo-Casier (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2012) Atomic Layer Deposition, 12th International conference, Abstract book.

Academic Bibliography

ereprof. dr. Johan Haemers

Plasma-enhanced ALD on particles and powders

Thermal and plasma enhanced atomic layer deposition on powders and particles

Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor

Influencing the hysteresis during reactive magnetron sputtering by gas separation

Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

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