ereprof. dr. Johan Haemers
No current affiliation with UGent
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- Conference Paper
- C3
- open access
Plasma-enhanced ALD on particles and powders
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- Conference Paper
- C3
- open access
Thermal and plasma enhanced atomic layer deposition on powders and particles
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Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor
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- Conference Paper
- C3
- open access
Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor
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Influencing the hysteresis during reactive magnetron sputtering by gas separation
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- Conference Paper
- C3
- open access
Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor
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- Conference Paper
- C1
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate
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- Conference Paper
- C3
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects