Li'ao Cao Faculty of Sciences > Department of Solid state sciences Work address Krijgslaan 281, S1 9000 Gent Email LiAo.Cao@UGent.be 1 – 3 of 3 publications Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Filter publications Save this search Download search results Subscribe to news feed Add to list Journal Article A1 open access A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 38(2). Add to list Journal Article A1 Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Fatemeh SM Hashemi, Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, J Ruud van Ommen and Christophe Detavernier (UGent) (2019) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 37(4). Add to list Journal Article A1 Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study Ba Tai Truong (UGent) , Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Geert Rampelberg (UGent) , Fatemeh SM Hashemi, Jolien Dendooven (UGent) , J Ruud van Ommen, Christophe Detavernier (UGent) and Marie-Françoise Reyniers (UGent) (2019) JOURNAL OF PHYSICAL CHEMISTRY C. 123(1). p.485-494
