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Atomic Layer Deposition of Lithium Borate and Lithium Borophosphate for Lithium-Ion Batteries
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Molecular Layer Deposition of Metal Organophosphonate Thin Films
(2024) p.109-110 -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-ion Battery Applications
(2024) -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-ion Battery Applicaitons
(2023) -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-Ion Battery Applications
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- Conference Paper
- C3
- open access
Strategies to produce boron-containing ALD thin films using trimethyl borate precursor : from thermal to plasma to combined-plasma approach
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- Journal Article
- A1
- open access
Atomic layer deposition of metal phosphates
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Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate
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- Journal Article
- A1
- open access
Atomic layer deposition of SnO2-based composite anodes for thin-film lithium-ion batteries
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Atomic layer deposition of indium‐tin‐oxide as multifunctional coatings on V2O5 thin‐film model electrode for lithium‐ion batteries