Show
Sort by
-
Vapour phase deposition of phosphonate-containing alumina thin films using dimethyl vinylphosphonate as precursor
-
Atomic layer deposition of lithium borate and lithium borophosphate for lithium-ion batteries
-
Molecular Layer Deposition of Metal Organophosphonate Thin Films
(2024) p.109-110 -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-ion Battery Applications
(2024) -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-ion Battery Applicaitons
(2023) -
- Conference Paper
- open access
Atomic Layer Deposition of Lithium Borate and Borophosphate Thin Films for Lithium-Ion Battery Applications
-
- Conference Paper
- C3
- open access
Strategies to produce boron-containing ALD thin films using trimethyl borate precursor : from thermal to plasma to combined-plasma approach
-
- Journal Article
- A1
- open access
Atomic layer deposition of metal phosphates
-
Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate
-
- Journal Article
- A1
- open access
Atomic layer deposition of SnO2-based composite anodes for thin-film lithium-ion batteries