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- Journal Article
- A1
- open access
Atomic layer deposition of ruthenium dioxide based on redox reactions between alcohols and ruthenium tetroxide
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- Conference Paper
- C3
- open access
An IR spectroscopy study of the degradation of surface bound azido-groups in high vacuum
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Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate
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- Conference Paper
- C3
- open access
Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification
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- Journal Article
- A1
- open access
An IR spectroscopy study of the degradation of surface bound azido-groups in high vacuum
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- Journal Article
- A1
- open access
Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
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- Journal Article
- A1
- open access
Emergence of metallic conductivity in ordered one-dimensional coordination polymer thin films upon reductive doping
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Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification
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Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor
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- Journal Article
- A1
- open access
Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma