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Effect of space charge on the negative oxygen flux during reactive sputtering
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Sputter deposition of Ce(Sm,Y)O2 thin films : linking phase instability to grain size
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The effect of negative oxygen ions on the growth of sputter deposited ceria thin films
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Momentum transfer driven textural changes of CeO2 thin films
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- Journal Article
- A1
- open access
Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films