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DFT investigation into alumina ALD growth inhibition on hydroxylated amorphous silica surface
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- PhD Thesis
- open access
A density functional theory study of alumina atomic layer deposition on alumina and silica
(2015) -
Ab initio investigation of surface chemistry of alumina ALD on hydroxylated γ-alumina surface
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Understanding atomic layer deposition of aluminaover (100) hydroxylated gamma Al2O3 surface using DFT calculations
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Ab initio study of alumina-atomic layer deposition process