Qi Xie 21 – 24 of 24 publications Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Filter publications Download search results Subscribe to news feed Add to list Journal Article A1 The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films Qi Xie (UGent) , Yu-Long Jiang, Koen De Keyser, Christophe Detavernier (UGent) , Davy Deduytsche (UGent) , Guo-Ping Ru, Xin-Ping Qu and KN Tu (2010) MICROELECTRONIC ENGINEERING. 87(12). p.2535-2539 Add to list Journal Article A1 Texture of atomic layer deposited ruthenium Jan Musschoot, Qi Xie (UGent) , Davy Deduytsche (UGent) , Koen De Keyser, Delphine Longrie (UGent) , Johan Haemers (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe, Jan D'Haen and Christophe Detavernier (UGent) (2010) MICROELECTRONIC ENGINEERING. 87(10). p.1879-1883 Add to list Journal Article A1 The effects of deposition temperature and ambient on the physical and electrical performance of DC-sputtered n-ZnO/p-Si heterojunction Tao Chen, Shu-Yi Liu, Qi Xie (UGent) , Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) and Xin-Ping Qu (2010) APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. 98(2). p.357-365 Add to list Journal Article A1 Ru thin film grown on TaN by plasma enhanced atomic layer deposition Qi Xie (UGent) , YL Jiang, Jan Musschoot, Davy Deduytsche (UGent) , Christophe Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) , S Van den Berghe, GP Ru, BZ Li and XP Qu (2009) THIN SOLID FILMS. 517(16). p.4689-4693 ← Previous 1 2 3