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Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
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Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)
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Fundamental aspects of mixed oxide thin film growth
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Rotatable magnetron sputtering: downscaling for better understanding
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- Conference Paper
- C3
- open access
Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
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Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
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Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere
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In search for the limits of rotating cylindrical magnetron sputtering
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Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides
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- Book Chapter
- open access
Sputter deposition processes
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An in-situ monitor to measure the momentum flux during physical vapour deposition
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The origin of Bohm diffusion, investigated by a comparison of different modelling methods
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Rotating cylindrical magnetron sputtering: simulation of the reactive process
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Putting a rotatable magnetron to the test with high power impulse magnetron sputtering
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Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
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Compositional effects on the growth of Mg(M)O films
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Influence of the magnetic field configuration on the reactive sputter deposition of TiN
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High power impulse magnetron sputtering using a rotating cylindrical magnetron
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Linking reactive sputtering models to experimental reality by determining the real-time parameters
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Investigation of the O- ion emission during reactive magnetron sputtering