Stijn Mahieu

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- Journal Article
- A1
Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Grégory Abadias, Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2013) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 46(5).
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- Miscellaneous
Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)

Marta Martins Saraiva (UGent) , Violeta Georgieva, Stijn Mahieu (UGent) , Koen Van Aeken (UGent) , Annemie Bogaerts and Diederik Depla (UGent)

(2011) JOURNAL OF APPLIED PHYSICS. 110(12).
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- Conference Paper
- C3
Fundamental aspects of mixed oxide thin film growth

Marta Martins Saraiva (UGent) , V Georgieva, N Jehanathan, Stijn Mahieu (UGent) , Wouter Leroy (UGent) , R Persoons, G Van Tendeloo, A Bogaerts and Diederik Depla (UGent)

(2011) ICMCTF 2011 : 38th ICMCTF : program, technical sessions, abstracts, exibition. p.119-120
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- Journal Article
- A1
Rotatable magnetron sputtering: downscaling for better understanding

Roger De Gryse (UGent) , Diederik Depla (UGent) , Stijn Mahieu (UGent) and Johan Haemers (UGent)

(2011) MATERIALS TECHNOLOGY. 26(1). p.3-9
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- Conference Paper
- C3
- open access
Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2011) E-MRS Spring Meeting, Abstracts.
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- Journal Article
- A1
Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Stijn Mahieu (UGent) , Wouter Leroy (UGent) , Koen Van Aeken (UGent) , M Wolter, J Colaux, S Lucas, G Abadias, Paul Matthys (UGent) and Diederik Depla (UGent)

(2011) SOLAR ENERGY. 85(3). p.538-544
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- Journal Article
- A1
Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere

Wouter Leroy (UGent) , Stephanos Konstantinidis, Stijn Mahieu (UGent) , Rony Snyders and Diederik Depla (UGent)

(2011) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 44(11).
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- Conference Paper
- C3
In search for the limits of rotating cylindrical magnetron sputtering

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Roger De Gryse (UGent) and Diederik Depla (UGent)

(2010) Magnetron, Ion processing and Arc Technologies European conference, Abstracts.
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- Conference Paper
- C3
Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2010) Twelfth international conference on plasma surface engineering : abstracts. p.521-521
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- Book Chapter
- open access
Sputter deposition processes

Diederik Depla (UGent) , Stijn Mahieu (UGent) and Joseph Greene

(2010) Handbook of deposition technologies for films and coatings : science, applications and technology. p.253-296
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- Journal Article
- A1
An in-situ monitor to measure the momentum flux during physical vapour deposition

Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2010) SURFACE & COATINGS TECHNOLOGY. 204(12-13). p.2085-2088
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- Journal Article
- A1
The origin of Bohm diffusion, investigated by a comparison of different modelling methods

Evi Bultinck, Stijn Mahieu (UGent) , Diederik Depla (UGent) and Annemie Bogaerts

(2010) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 43(29).
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- Journal Article
- A1
Rotating cylindrical magnetron sputtering: simulation of the reactive process

Diederik Depla (UGent) , Xiuyang Li, Stijn Mahieu (UGent) , Koen Van Aeken (UGent) , Wouter Leroy (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and Annemie Bogaerts

(2010) JOURNAL OF APPLIED PHYSICS. 107(11).
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- Journal Article
- A4
Putting a rotatable magnetron to the test with high power impulse magnetron sputtering

Wouter Leroy (UGent) , Stijn Mahieu (UGent) , Diederik Depla (UGent) and Arutiun Ehiasarian

(2010) BELVAC NEWS. 26(1). p.5-11
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- Journal Article
- A1
Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition

Max Horkel, Koen Van Aeken (UGent) , Christophe Eisenmenger-Sittner, Diederik Depla (UGent) , Stijn Mahieu (UGent) and Wouter Leroy (UGent)

(2010) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 43(7).
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- Journal Article
- A1
Compositional effects on the growth of Mg(M)O films

Marta Martins Saraiva (UGent) , Violeta Georgieva, Stijn Mahieu (UGent) , Koen Van Aeken (UGent) , Annemie Bogaerts and Diederik Depla (UGent)

(2010) JOURNAL OF APPLIED PHYSICS. 107(3).
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- Journal Article
- A1
Influence of the magnetic field configuration on the reactive sputter deposition of TiN

Francis Boydens (UGent) , Stijn Mahieu (UGent) , Johan Haemers (UGent) and Diederik Depla (UGent)

(2010) PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 207(1). p.124-128
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- Journal Article
- A1
High power impulse magnetron sputtering using a rotating cylindrical magnetron

Wouter Leroy (UGent) , Arutiun Ehiasarian, Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2010) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 28(1). p.108-111
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- Conference Paper
- C3
Linking reactive sputtering models to experimental reality by determining the real-time parameters

Wouter Leroy (UGent) , Koen Van Aeken (UGent) , Koen Strijckmans (UGent) , Stijn Mahieu (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2009) International symposium on reactive sputter deposition, RSD2009 : programme and book of abstracts.
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- Conference Paper
- C3
Investigation of the O- ion emission during reactive magnetron sputtering

Stijn Mahieu (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)

(2009) ICMCTF 2009 : the 36th international conference on metallurgical coatings and thin films : program and abstracts. p.60-61

Academic Bibliography

Stijn Mahieu

Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)

Fundamental aspects of mixed oxide thin film growth

Rotatable magnetron sputtering: downscaling for better understanding

Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Sputter deposited transition metal nitrides as back electrode for CIGS solar cells

Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere

In search for the limits of rotating cylindrical magnetron sputtering

Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides

Sputter deposition processes

An in-situ monitor to measure the momentum flux during physical vapour deposition

The origin of Bohm diffusion, investigated by a comparison of different modelling methods

Rotating cylindrical magnetron sputtering: simulation of the reactive process

Putting a rotatable magnetron to the test with high power impulse magnetron sputtering

Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition

Compositional effects on the growth of Mg(M)O films

Influence of the magnetic field configuration on the reactive sputter deposition of TiN

High power impulse magnetron sputtering using a rotating cylindrical magnetron

Linking reactive sputtering models to experimental reality by determining the real-time parameters

Investigation of the O- ion emission during reactive magnetron sputtering

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