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- 2013
- Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
- 2011
- Compositional effects on the growth of Mg(M)O films (vol 107, 034902, 2010)
- Fundamental aspects of mixed oxide thin film growth
- Rotatable magnetron sputtering: downscaling for better understanding
- Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
- Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
- Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere
- 2010
- In search for the limits of rotating cylindrical magnetron sputtering
- Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides
- Sputter deposition processes