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0000-0001-6606-2480
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The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films
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- Journal Article
- A1
- open access
Growth mechanisms and mechanical response of 3D superstructured cubic and hexagonal Hf1-xAlxN thin films
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Sputtering onions
(2025) -
- Journal Article
- A1
- open access
Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films
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- Journal Article
- A1
- open access
Convergence during feedback controlled reactive magnetron sputtering : mechanisms and classification
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- Journal Article
- A1
- open access
A python-based approach to sputter deposition simulations in combinatorial materials science
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- Journal Article
- A1
- open access
Industrial reactive sputter deposition of TiZrN coatings : the role of nitrogen partial pressure
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- Journal Article
- A1
- open access
PM2.5 and PM10 adsorption onto filters and surfaces functionalized with calcium carbonate particle assembly
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- Journal Article
- A1
- open access
Phase composition of sputter deposited tungsten thin films
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- Journal Article
- A1
- open access
Floating potential probes for process control during reactive magnetron sputtering