ereprof. dr. ir. Roland Vanmeirhaeghe
- ORCID iD
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0000-0002-2775-6487
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Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements
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TaCN growth with PDMAT and H-2/Ar plasma by plasma enhanced atomic layer deposition
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- Journal Article
- A1
- open access
Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
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Conformality of Al2O3 and AlN deposited by plasma-enhanced atomic layer deposition
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Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
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In situ X-ray diffraction study of thin film Ir/Si solid state reactions
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In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)
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In situ and ex situ investigation on the annealing performance of the ZnO film grown by ion beam deposition
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The effects of deposition temperature and ambient on the physical and electrical performance of DC-sputtered n-ZnO/p-Si heterojunction
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In situ study of the formation of silicide phases in amorphous Co-Si mixed layers