Show
Sort by
-
Monte Carlo simulation of the transport of atoms in DC magnetron sputtering
-
- PhD Thesis
- open access
Simplified model for the d.c. planar magnetron discharge
(2005) -
- Conference Paper
- C1
- open access
Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion
-
Simplified model for the DC planar magnetron discharge
-
Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge
-
Simplified model for the DC planar magnetron discharge
-
Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge
-
Recapture of secondary electrons by the target in a DC planar magnetron discharge
-
- Conference Paper
- C1
- open access
Dissection of the Planar Magnetron Discharge
-
Uniformity Control in Sputter Deposition Processes.