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The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas
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Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
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On the grain size-thickness correlation for thin films
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Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films
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The role of reactive gases during sputter deposition of complex alloys
(2020) -
Mechanical properties of CoCrCuFeNi multi-principal element alloy thin films on Kapton substrates
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Reactive sputter deposition of CoCrCuFeNi in oxygen/argon mixtures
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- Journal Article
- A1
- open access
Sputter deposition of porous thin films from metal/NaCl powder targets
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- Journal Article
- A1
- open access
Modeling reactive magnetron sputtering : opportunities and challenges
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Impurity controlled thin film growth