Farzaneh Ahangarani Farahani Faculty of Sciences > Department of Solid state sciences 1 – 2 of 2 publications Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Filter publications Download search results Subscribe to news feed Add to list Journal Article A1 open access The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films Farzaneh Ahangarani Farahani (UGent) , M. Akagawa, T. Shimizu and Diederik Depla (UGent) (2026) APPLIED SURFACE SCIENCE. 718. Add to list Journal Article A1 open access Phase composition of sputter deposited tungsten thin films Farzaneh Ahangarani Farahani (UGent) and Diederik Depla (UGent) (2024) SURFACE & COATINGS TECHNOLOGY. 494.
